Quattrone Nanofabrication Facility:Quattrone Nanofabrication Facility at UPenn
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Contents
- ABM3000HR Mask Aligner
- ADT 7100 Dicing Saw
- Ag master recipe
- Al master recipe
- Ana Cohen
- Anatech SCE-106 Barrel Asher
- Anatech SCE-108 Barrel Asher
- Ancillary Process Chemicals at QNF
- Apogee Spinner - E-Beam Resist
- Apogee Spinner - Positive Resist (Left)
- Apogee Spinner - Positive Resist (Right)
- Asylum AFM
- Au (gold)
- Au master recipe
- CEE 200X Spinner
- Cambridge Nanotech S200 ALD
- Cu master recipe
- Dan Sabrsula
- David Barth
- David Jones
- Denton Explorer14 Magnetron Sputterer
- Developers at QNF
- EBSD
- EDS
- EMS/Quorum Q150T ES Sputter Coater
- EVG 510 Wafer Bonder
- EVG 620 Wafer Bond Aligner
- Elionix ELS-7500EX E-Beam Lithography System
- Equipment
- Eric Johnston
- Ever wondered how plasma etch works?
- External Resources
- Feaz Kalamodeen
- Fiji G2 ALD
- Filmetrics F40
- Filmetrics F50 (UV Filter)
- Filmetrics F50 (White Light)
- Filmetrics Profilm3D
- Focused Ion Beam Microscopy
- Gatan Solarus 950 Advanced Plasma System
- General Equipment Information
- Gyuseok Kim
- Heidelberg DWL 66+ Laser Writer
- Horiba Confocal
- How PVD works
- How plasma etch works
- IPG IX-255 Excimer Micromachining Laser
- IPG IX280-DXF Green Micromachining Laser
- Icon AFM
- JEOL 7500F HRSEM
- JEOL F200
- JEOL NEOARM
- Jacob Trevino
- Jandel Multi Height Four Point Probe
- Jarrett Gilinger
- Jason A. Röhr
- Join
- Jupiter II RIE Plasma Etcher
- K&S Wire Bonder
- KLA Tencor P7 2D&3D/stress profilometer
- KLA Tencor P7 2D profilometer
- Keyence Profilometer
- Kyle Keenan
- LMM-02 Green Laser Troubleshooting
- Lesker Nano-36 Thermal Evaporator
- Lesker PVD75 DC/RF Sputterer
- Lesker PVD75 E-Beam/Thermal Evaporator
- Lesker PVD75 E-beam Evaporator
- Litho Workstation for BEAMER and TRACER
- Low Vacuum SEM
- Low Voltage SEM
- Lucas Barreto
- MPT Corp. RTP-600S Rapid Thermal Annealer
- Main Page
- Micromanipulator 4060 Probe Station
- Mo master recipe
- Nanonex NX2600 Nanoimprint
- Nanoscale Characterization Facility
- Nanoscribe Photonic Professional GT
- Omicron VT AFM-STM
- Open Forum
- Oxford 80 Plus RIE
- Oxford Cobra ICP Etcher
- Oxford PlasmaLab 100 PECVD
- Probe Station
- Process Resources
- Pt master recipe
- QNF Equipment Owner Matrix
- QNF Staff
- Quattrone Nanofabrication Facility
- Quattrone Nanofabrication Facility at UPenn
- RENA Compass Dual Stack Spin Rinse Dryer
- Raith EBPG5200+ E-Beam Lithography System
- Raman-NSOM
- Resists at QNF
- SCS PDS2010 Parylene Coater
- SLPF Equipment
- SPTS/Xactix XeF2 Isotropic Etcher
- SPTS Si DRIE
- STEM
- SUSS MicroTec AS8 AltaSpray
- SUSS MicroTec MA6 Gen3 Mask Aligner
- Safety Resources
- Sam Azadi
- Sample Preparation
- Sandvik Furnace Stack
- Scanning & Local Probe Facility
- Scanning Electron Microscopy
- Singh Center for Nanotechnology
- Spinner - Positive Resist (Left) - POLOS
- Spinner - SU-8/PDMS
- TESCAN S8000X FIB/SEM
- TFS Quanta 600 FEG ESEM
- TPT HB100 Wire Bonder
- Ti (titanium)
- Ti master recipe
- Total Internal Reflection Fluorescence AFM
- Tousimis Critical Point Dryer
- Transmission Electron Microscopy
- Veeco Savannah 200
- W master recipe
- What is ALD?
- What is Atomic Layer Deposition?
- What is Chemical Vapor Deposition (CVD)?
- Woollam V-VASE Ellipsometer
- ZEP Process Data
- Zeiss Axio Imager M2m Microscopes
- Zygo NewView 7300 Optical Profilometer
Getting started
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