Nanonex NX2600 Nanoimprint
|Tool Name||Nanonex NX2600 Nanoimprint|
|Staff Manager||David Barth|
|Lab Location||Bay 2|
The NX-2600 Nanoimprint Lithography (NIL) instrument allows rapid high resolution replication of template features into spin-coated resist on a range of substrates. The instrument is capable of thermal embossing (T-NIL) using thermoplastic polymers, as well as UV-assisted embossing (UV-NIL) using UV curable polymers. The NX-2600 utilizes Air Cushion Press (ACP) technology that provides excellent uniformity of the pattern transfer.
- Thermal nanoimprint lithography
- UV nanoimprint lithography