Filmetrics F50 (UV Filter)

From Quattrone Nanofabrication Facility
Jump to navigation Jump to search


Filmetrics F50 (UV Filter)
MET-03.jpeg
Tool Name Filmetrics F50 (UV Filter)
Instrument Type Metrology
Staff Manager Sam Azadi
Lab Location Bay 2
Tool Manufacturer Filmetrics
Tool Model F50
Iris Designation MET-03
Lab Phone XXXXX
SOP Link SOP

Description

The Filmetrics F50 family of products can map film thickness as quickly as two points per second. A motorized R-Theta stage accepts standard and custom chucks for samples up to 200mm in diameter. This system has a UV filter installed and is used for measuring film thicknesses of UV sensitive photoresists. A second F50 system without UV filters is located in the QNF (MET-11).

Map patterns can be polar, rectangular, or linear, or you can create your own with no limit on the number of measurement points. Dozens of pre-defined map patterns are supplied.

Applications
  • Thin-film thickness optical measurements


Resources

SOPs & Troubleshooting