Filmetrics F50 (UV Filter)
|Tool Name||Filmetrics F50 (UV Filter)|
|Staff Manager||Sam Azadi|
|Lab Location||Bay 2|
The Filmetrics F50 family of products can map film thickness as quickly as two points per second. A motorized R-Theta stage accepts standard and custom chucks for samples up to 200mm in diameter. This system has a UV filter installed and is used for measuring film thicknesses of UV sensitive photoresists. A second F50 system without UV filters is located in the QNF (MET-11).
Map patterns can be polar, rectangular, or linear, or you can create your own with no limit on the number of measurement points. Dozens of pre-defined map patterns are supplied.
- Thin-film thickness optical measurements