MPT Corp. RTP-600S Rapid Thermal Annealer

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MPT Corp. RTP-600S Rapid Thermal Annealer
BE-05.jpeg
Tool Name MPT Corp. RTP-600S Rapid Thermal Annealer
Instrument Type Back End
Staff Manager David Barth
Lab Location Bay 2
Tool Manufacturer MPT Corp.
Tool Model RTP-600S
Iris Designation BE-05
Lab Phone XXXXX
SOP Link SOP

Description

The RTP-600S system is an advanced bench-top rapid thermal processing system with multi-gas capabilities. The system processes wafers up to 6″ in diameter. The integrated process control system features real-time graphics, recipe management, data acquisition and display and has a comprehensive diagnostic function.

The system is configured for ≤800°C processing with thermocouple and has the option to flow in nitrogen as a process gas.

Applications
  • Rapid thermal annealing of thin-films.


Resources

SOPs & Troubleshooting