Jupiter II RIE Plasma Etcher

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Jupiter II RIE Plasma Etcher
DE-08.jpeg
Tool Name Jupiter II RIE Plasma Etcher
Instrument Type Etch
Staff Manager Sam Azadi
Lab Location Bay 2
Tool Manufacturer March
Tool Model Jupiter II
Iris Designation DE-08
Lab Phone 215-898-9748
SOP Link SOP

Description

The March Jupiter II is a reactive ion etcher configured with O2 gas. The system is typically used as a plasma asher/cleaner.

Applications
  • Removal of photoresist
  • Removal of organic materials


Resources

SOPs & Troubleshooting