Lesker PVD75 E-beam Evaporator
|Tool Name||Lesker PVD75 E-Beam/Thermal Evaporator|
|Instrument Type||Physical vapor deposition|
|Staff Manager||Jason (firstname.lastname@example.org)|
|Lab Location||Bay 2|
|Tool Manufacturer||Kurt J. Lesker|
The Kurt J. Lesker PVD75 E-beam Evaporator is an electron-beam (e-beam) evaporation tool. The tool is a fully automated system for depositing Ti, Cr, Au, and/or Pd. The tool also comes with a load-lock, allowing for fast and easy transfer of samples in and out of the system. While less flexible than the PVD-02 deposition system in terms of available materials, the PVD-04 is a much faster tool.
The tool contains the following materials:
- Au - Gold
- Cr - Chromium
- Pd - Palladium
- Ti - Titanium
Deposition is limited to thin-film thicknesses of ~100 nm.
Link: PVD-4 Training Video
SOPs & Troubleshooting
Link: QNF SOP