Apogee Spinner - E-Beam Resist
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| Tool Name | Apogee Spinner - E-Beam Resist |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Ana Cohen |
| Lab Location | Bay 4 |
| Tool Manufacturer | CEE |
| Tool Model | Apogee |
| NEMO Designation | SPN-06 |
| Lab Phone | |
| SOP Link | SOP |
Description
CEE Apogee spincoater for e-beam resist only – PMMA A series, 1000 HARP series, ZEP520, HSQ. No PMGI or Polyimide
Control of ramp rate and speed. Includes wafer centering step.
Use SPN-01 for submitting training request
Resources
SOPs & Troubleshooting
- SOP: SOP
- Video - Manual Dispense
- Video - Centering Device
- Video - Chuck Installation
- Video - Chuck Assembly