KLA Tencor P7 2D&3D/stress profilometer
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| Tool Name | KLA Tencor P7 2D&3D/stress profilometer |
|---|---|
| Instrument Type | Metrology |
| Staff Manager | David Barth |
| Lab Location | Bay 2 |
| Tool Manufacturer | KLA |
| Tool Model | P7 |
| NEMO Designation | MET-02 |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The KLA-Tencor P7 Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. The KLA-Tencor Profiler systems use stylus-based scanning to achieve high resolution.
Applications
- Film step height measurements
- Photo resist thickness
- Etched trench depth
- Materials characterization for surface roughness and waviness
- Wafer bow / stress measurements