Micromanipulator 4060 Probe Station
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| Tool Name | Micromanipulator 4060 Probe Station |
|---|---|
| Instrument Type | Electrical Characterization |
| Staff Manager | Dan Sabrsula |
| Lab Location | Cleanroom Corridor |
| Tool Manufacturer | Micromanipulator |
| Tool Model | 4060 Manual Probe Station |
| NEMO Designation | MET-09 |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The system allows probing of wafers, MOSFETs, or samples of widely varying dimensions. The probe station is set up for use with up to two Keithley 2450 Source Measure Units (SMU) across four articulated probe heads. Each probe head uses a Tungsten probe tip with a 500nm tip radius to make contact with the device under test. The probe station is capable of performing a wide variety of measurements including: 2-point and 4-point resistivity measurements, time dependent I-V characterization, and other highly customizable tests.
Applications
- Material resistivity measurements
- I-V characterization
- Gate/Drain measurements