Oxford Cobra ICP Etcher

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Oxford Cobra ICP Etcher
DE-05.jpeg
Tool Name Oxford Cobra ICP Etcher
Instrument Type Etch
Staff Manager Sam Azadi
Lab Location Bay 2
Tool Manufacturer Oxford Instruments
Tool Model Cobra PlasmaPro 100
Iris Designation DE-05
Lab Phone 215-898-9748
SOP Link SOP

Description

Oxford PlasmaPro 100 is an inductively coupled plasma (ICP) etcher. The tool uses an RF magnetic field to induce an RF electric field and energize the electrons that result in the ionization of gas molecules and atoms at low pressures. The plasma created in the ICP tool is denser, which allows for a wider range of etching.

The tool is connected to the following gases: BCl3, Cl2, Ar, O2, SF6, CF4, and CHF3.

Applications
  • Etch of Si
  • Etch of SiO2
  • Etch of SiNx
  • Etch of InP
  • Etch of Al, Cr, Ti, hafnia, alumina ....

- for a complete list of materials etched in the tool please refer to the SOP at the bottom off this page

Resources

SOPs & Troubleshooting