Woollam V-VASE Ellipsometer

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Woollam V-VASE Ellipsometer
Tool Name Woollam V-VASE Ellipsometer
Instrument Type Metrology
Staff Manager Eric Johnston
Lab Location Bay 2
Tool Manufacturer J. A. Woollam Co.
Tool Model V-Vase
Iris Designation MET-06
Lab Phone XXXXX


The V-VASE is a Variable Angle Spectroscopic Ellipsometer and features totally automated thin film characterization, high-precision angle, and a wide spectral range (240nm to 1700nm). It has a vertical sample mounting, automated sample mapping, and focused spot size. Some of the key benefits are: highest precision and accuracy of any Spectroscopic Ellipsometer, totally automated angle of incidence, nondestructive materials analysis, easily characterize all types of materials: semiconductors, dielectrics, polymers, metals, multilayers, and more

  • Reflection and Transmission Ellipsometry
  • Generalized Ellipsometry
  • Reflectance (R) intensity
  • Transmittance (T) intensity
  • Cross-polarized R/T
  • Depolarization
  • Scatterometry
  • Mueller-matrix


SOPs & Troubleshooting