Pt master recipe

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Step T006 is the deposition step.

Step Number	T000	T001	T002	T003	T004	T005	T006	T007	T008	T009	T010	T011	T012	T013
Step Time (sec)	5	30	30	30	30	30	[dep]	30	30	30	30	30	400	5
Min Vacuum Setpoint (Torr)
Gas - (PID or Fixed)		PID	PID	PID	PID	PID	PID	PID	PID	PID	PID	PID
Gas - PID Master Gas Select		1	1	1	1	1	1	1	1	1	1	1
Gas1 - Setpoint (sccm)		10	10	10	10	10	10	10	10	10	10	10
Gas2 - Setpoint (sccm)
Gas PID Pressure (mTorr)		3	3	3	3	3	3	3	3	3	3	3
RF Source - Sputter (Watts)
RF Source - Cathode Select
RF Source - Shutter
DC 1 Source - Sputter (Watts)		25	50	75	100	125	140	120	100	80	60	25
DC 1 Source - Cathode Select		1	1	1	1	1	1	1	1	1	1	1
DC 1 Source - Shutter							Open
DC 2 Source - Sputter (Watts)
DC 2 Source - Shutter
Pressure Control (Throttle)	Yes	Yes	Yes	Yes	Yes	Yes	Yes	Yes	Yes	Yes	Yes	Yes
Ignition Pressure (mTorr)
Rotation Speed (0-100%)	50	50	50	50	50	50	50	50	50	50	50	50	50
End Process (Yes)														Yes