Apogee Spinner - Positive Resist (Right)
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| Tool Name | Apogee Spinner - Positive Resist (Right) |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Ana Cohen |
| Lab Location | Bay 5 |
| Tool Manufacturer | CEE |
| Tool Model | Apogee |
| NEMO Designation | SPN-03 |
| Lab Phone | |
| SOP Link | SOP |
Description
CEE Apogee spincoater located on right side of positive spin bench. For positive resists, including LOR, PMGI, Polyimide. Bilayer LOR process should be only done here.
Control of ramp rate and speed. Includes wafer centering step.
Use SPN-01 for submitting training request
Resources
SOPs & Troubleshooting
- SOP: SOP
- Video - Manual Dispense
- Video - Centering Device
- Video - Chuck Installation
- Video - Chuck Assembly