EDS

Overview

Energy dispersive x-ray spectroscopy (EDS) or (EDX) is an analytical technique allowing for precise elemental characterization of specimens in an electron microscope. Results are collected as spectra and typically presented as an elemental map or a quantitative distribution. Data may be collected from an entire image, a region, a single point or series of points, or a line drawn across an image. Signal for EDS analysis is generated when an incident electron beam displaces electrons in a specimen, causing higher energy electrons to fall and fill the lower energy vacancy, emitting a photon of a characteristic energy in the process. Signal may be generated from up to 1um beneath the specimen surface.

Equipment

Scanning Electron Microscopes

• JEOL 7500F HRSEM (EDAX)
• TFS Quanta 600 FEG ESEM (EDAX)

Focused Ion Beam Microscopes

• TESCAN S8000X FIB/SEM (EDAX)

Transmission Electron Microscopes

• JEOL F200
• JEOL NEOARM