Tousimis Critical Point Dryer
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|Tool Name||Tousimis Critical Point Dryer|
|Instrument Type||Back End|
|Staff Manager||David Jones|
|Lab Location||Bay 2|
The system enables drying of delicate samples through the use of liquid carbon dioxide as a transitional fluid which has zero surface tension at the critical point (1072 psi at 31 C). The tool can process pieces up to several 100 mm substrates.
- Carbon dioxide (CO2) drying after release of bulk or surface micromachined devices