Tousimis Critical Point Dryer

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Tousimis Critical Point Dryer
CPD-01.jpeg
Tool Name Tousimis Critical Point Dryer
Instrument Type Back End
Staff Manager David Jones
Lab Location Bay 2
Tool Manufacturer Tousimis
Tool Model 931-C
Iris Designation CPD-01
Lab Phone XXXXX
SOP Link SOP

Description

The system enables drying of delicate samples through the use of liquid carbon dioxide as a transitional fluid which has zero surface tension at the critical point (1072 psi at 31 C). The tool can process pieces up to several 100 mm substrates.

Applications
  • Carbon dioxide (CO2) drying after release of bulk or surface micromachined devices


Resources

SOPs & Troubleshooting