Elionix ELS-7500EX E-Beam Lithography System
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|Tool Name||Elionix ELS-7500EX E-Beam Lithography System|
|Staff Manager||David Barth|
|Lab Location||Bay 4|
The Elionix ELS-7500EX is an electron beam lithography tool capable of high resolution patterning at 50 kV with currents from 10 pA to 20 nA.
- Patterning of positive and negative e-beam resists with features from ~10 nm to micron scale
- Standard semiconductor materials
- Low vapor pressure metals
SOPs & Troubleshooting
- March 4, 2022: There is a minor issue with the vacuum in the loadlock. The loadlock will not pump down from a partially evacuated state. In order to pump the loadlock if it was not already vented, you must first vent it, and then pump it down again.