Spinner - SU-8/PDMS

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Spinner - SU8/PDMS
SPN-07.png
Tool Name Spinner - SU8/PDMS
Instrument Type Lithography
Staff Manager Eric Johnston
Lab Location Soft Lithography
Tool Manufacturer CEE
Tool Model 200X
Iris Designation SPN-07
Lab Phone 3-9639
SOP Link SOP

Description

Spinner for coating substrates with thicker resists as well as PDMS. Control of ramp rate and speed. Includes wafer centering step.

Resources

SOPs & Troubleshooting
  • SOP: SOP
  • Video for basic tool use (6.47min):Video