Apogee Spinner - Positive Resist (Left)
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| Tool Name | Apogee Spinner - Positive Resist (Left) |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Ana Cohen |
| Lab Location | Bay 5 |
| Tool Manufacturer | CEE |
| Tool Model | Apogee |
| NEMO Designation | SPN-01 |
| Lab Phone | |
| SOP Link | SOP |
Description
CEE Apogee spincoater located on left side of positive spin bench. For acetone compatible/soluble resists only – S18xx, SPR 220-x, AZ series, KL series, K-Pro. *No LOR, PMGI, Polyimide*
Control of ramp rate and speed. Includes wafer centering step.
Resources
SOPs & Troubleshooting
- SOP: SOP
- Video - Manual Dispense
- Video - Centering Device
- Video - Chuck Installation
- Video - Chuck Assembly