Ag master recipe

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Step T006 is the deposition step. Note the extra long cool-down time in step T012. Reducing the cool-down time will result in significant surface oxidation. Please do not alter this time.

Step Number	T000	T001	T002	T003	T004	T005	T006	T007	T008	T009	T010	T011	T012	T013
Step Time (sec)	5	30	30	30	30	30	[dep]	30	30	30	30	30	900	5
Min Vacuum Setpoint (Torr)
Gas - (PID or Fixed)		PID	PID	PID	PID	PID	PID	PID	PID	PID	PID	PID
Gas - PID Master Gas Select		1	1	1	1	1	1	1	1	1	1	1
Gas1 - Setpoint (sccm)		10	10	10	10	10	10	10	10	10	10	10
Gas2 - Setpoint (sccm)
Gas PID Pressure (mTorr)		3	3	3	3	3	3	3	3	3	3	3
RF Source - Sputter (Watts)
RF Source - Cathode Select
RF Source - Shutter
DC 1 Source - Sputter (Watts)		25	50	75	100	125	140	120	100	80	60	25
DC 1 Source - Cathode Select		1	1	1	1	1	1	1	1	1	1	1
DC 1 Source - Shutter							Open
DC 2 Source - Sputter (Watts)
DC 2 Source - Shutter
Pressure Control (Throttle)	Yes	Yes	Yes	Yes	Yes	Yes	Yes	Yes	Yes	Yes	Yes	Yes
Ignition Pressure (mTorr)
Rotation Speed (0-100%)	50	50	50	50	50	50	50	50	50	50	50	50	50
End Process (Yes)														Yes