Anatech SCE-106 Barrel Asher

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Anatech SCE-106 Barrel Asher
DE-07.jpeg
Tool Name Anatech SCE-106 Barrel Asher
Instrument Type Soft Lithography
Staff Manager Sam Azadi
Lab Location Bay 2
Tool Manufacturer Anatech
Tool Model SCE-106
Iris Designation DE-07
Lab Phone XXXXX
SOP Link SOP

Description

Anatech USA’s SCE-100 Series Inductively Coupled (ICP) Plasma systems are extremely effective for a Plasma Ashing process to remove organics prior to thin film deposition and/or chemical analysis of remaining inorganics.

Process gases are CF4, O2, Ar and N2. Sample sizes are pieces to 150 mm round wafers.

Applications
  • Removal of photoresist
  • Removal of organic materials


Resources

SOPs & Troubleshooting