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Combined display of all available logs of Quattrone Nanofabrication Facility. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 100 | older 100) (20 | 50 | 100 | 250 | 500)- 14:24, 15 May 2024 Dsbarth talk contribs created page ZEP Process Data (Created page with "<iframe height="400px" key="google" level="docs" path="/spreadsheets/u/0/d/e/2PACX-1vSvZG1_8z70Dl9liA3fY2p8jojsyW4ELRhjOzFc7UKzOlXOxWQ4XkD6m_RAMx8-u2E5G21yPdKG6loM/pubchart?oi...")
- 14:16, 15 May 2024 Dsbarth talk contribs changed group membership for Lucasamb from Editor to Editor and administrator
- 14:16, 15 May 2024 Dsbarth talk contribs changed group membership for Coana from Editor to Editor and administrator
- 14:16, 15 May 2024 Dsbarth talk contribs changed group membership for Dsabr from Editor to Editor and administrator
- 14:15, 15 May 2024 Dsbarth talk contribs changed group membership for Azadi from Editor to Editor and administrator
- 10:03, 10 May 2024 Dsbarth talk contribs deleted page File:CharlesV.jpeg
- 10:01, 10 May 2024 Dsbarth talk contribs deleted page Charles Veith (content before blanking was: "__NOTOC__ {{StaffMemberInfobox |StaffName = Charles Veith |StaffPhoto = CharlesV.jpeg |JobTitle = Purchasing Manager <br> Vender Relations (NNCI) |AreasResponsibility = Purchasing <br> Micro Contamination |PennID = cveith |Phone = 508-579-5487 (office) |OfficeLocation = 110 Singh }} == About == ===== Role in the QNF ===== Charles R. Veith is a Member of Technical Staff in the Quattrone Nanofabrication Facility. His main responsibilities are owner and manager of...")
- 13:17, 7 May 2024 Dsbarth talk contribs created page File:EBPG5200+ SOP.pdf (SOP for EBL-03)
- 13:17, 7 May 2024 Dsbarth talk contribs uploaded File:EBPG5200+ SOP.pdf (SOP for EBL-03)
- 10:33, 20 March 2024 Dsbarth talk contribs created page Lucas Barreto (Created page with "__NOTOC__ {{StaffMemberInfobox |StaffName = Lucas Barreto |StaffPhoto = Barreto.jpg |JobTitle = Principal Scientist |AreasResponsibility = CVD, Process Development |PennID = l...")
- 09:21, 20 March 2024 Dsbarth talk contribs created page File:Barreto.jpg (Photo of Lucas Barreto)
- 09:21, 20 March 2024 Dsbarth talk contribs uploaded File:Barreto.jpg (Photo of Lucas Barreto)
- 11:14, 18 March 2024 Dsbarth talk contribs changed group membership for Lucasamb from (none) to Editor
- 11:22, 28 February 2024 Dsbarth talk contribs changed group membership for Dsabr from (none) to Editor
- 11:09, 12 February 2024 Dsbarth talk contribs changed group membership for Bohnn from (none) to Editor
- 16:43, 22 November 2023 Dsbarth talk contribs created page File:EBL-03.jpg (Photo of EBL-03 (Raith EBPG5200+))
- 16:43, 22 November 2023 Dsbarth talk contribs uploaded File:EBL-03.jpg (Photo of EBL-03 (Raith EBPG5200+))
- 16:25, 22 November 2023 Dsbarth talk contribs created page Raith EBPG5200+ E-Beam Lithography System (Created page with "Category:Lithography {{EquipmentInfo | name = Raith EBPG5200+ E-Beam Lithography System | Tool_Name = Raith EBPG5200+ E-Beam Lithography System | image = Image:EBL-01.j...")
- 10:06, 20 June 2023 Dsbarth talk contribs changed group membership for Coana from (none) to Editor
- 11:23, 24 May 2023 Dsbarth talk contribs created page File:RENA Compass.jpg
- 11:23, 24 May 2023 Dsbarth talk contribs uploaded File:RENA Compass.jpg
- 11:19, 24 May 2023 Dsbarth talk contribs created page RENA Compass Dual Stack Spin Rinse Dryer (Created page with "Category:Wet Processing {{EquipmentInfo | name = RENA Compass Dual Stack Spin Rinse Dryer | Tool_Name = RENA Compass Dual Stack Spin Rinse Dryer | image = Image:MET-08....")
- 14:54, 10 May 2023 Dsbarth talk contribs created page Resists at QNF (Created page with "The QNF provides a variety of standard resists to meet demands for most applications. Some specialty resists are also sold through the QNF Stockroom. A summary of stocked resi...")
- 12:20, 20 April 2023 Dsbarth talk contribs created page File:MET-05 new.jpeg
- 12:20, 20 April 2023 Dsbarth talk contribs uploaded File:MET-05 new.jpeg
- 09:44, 12 April 2023 Dsbarth talk contribs created page Filmetrics Profilm3D (Created page with "Category:Metrology {{EquipmentInfo | name = Filmetrics Profilm3D Optical Profilometer | Tool_Name = Filmetrics Profilm3D Optical Profilometer | image = Image:MET-05.jpe...")
- 12:51, 8 November 2022 Dsbarth talk contribs created page File:SPN-01.jpg
- 12:51, 8 November 2022 Dsbarth talk contribs uploaded File:SPN-01.jpg
- 12:45, 8 November 2022 Dsbarth talk contribs created page Spinner - Positive Resist (Left) - POLOS (Created page with "Category:Lithography {{EquipmentInfo | name = Polos Spinner | Tool_Name = Polos Spinner | image = 300px | imagecaption = | Instrument_Type = Lithogr...")
- 15:07, 24 August 2022 Dsbarth talk contribs created page Process Resources (Created page with "= Soft Lithography = [https://upenn.box.com/s/b6e694cf6r5qul32cmsjkbr9oydc6d7o Course Material for the QNF Soft Lithography Workshop]")
- 14:19, 24 August 2022 Dsbarth talk contribs changed group membership for Venables from (none) to Editor
- 13:28, 8 August 2022 Dsbarth talk contribs changed protection level for QNF Equipment Owner Matrix [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 16:13, 30 June 2022 Dsbarth talk contribs removed protection from Quattrone Nanofabrication Facility (hist)
- 16:12, 30 June 2022 Dsbarth talk contribs removed protection from Main Page (hist)
- 09:19, 30 June 2022 Dsbarth talk contribs changed group membership for Jarrettg from Editor to (none)
- 09:17, 30 June 2022 Dsbarth talk contribs changed group membership for Dmyates from (none) to administrator and Editor
- 09:16, 30 June 2022 Dsbarth talk contribs changed group membership for Lopezg from (none) to administrator, interface administrator, bureaucrat and Editor
- 09:15, 30 June 2022 Dsbarth talk contribs changed group membership for Jarohr from (none) to Editor
- 13:56, 6 May 2022 Dsbarth talk contribs changed group membership for Mbrukman from Editor to Editor and administrator
- 13:56, 6 May 2022 Dsbarth talk contribs changed group membership for Tjford from Editor to Editor and administrator
- 13:55, 6 May 2022 Dsbarth talk contribs changed group membership for Tjford from (none) to Editor
- 13:55, 6 May 2022 Dsbarth talk contribs changed group membership for Mbrukman from (none) to Editor
- 14:40, 5 May 2022 Dsbarth talk contribs created page Scanning & Local Probe Facility (Created page with "Category:Facility {{LabInfo | name = Scanning & Local Probe Facility | image = 300px | imagecaption = A look inside the QNF cleanroom | Hom...")
- 13:35, 2 May 2022 Dsbarth talk contribs changed protection level for MPT Corp. RTP-600S Rapid Thermal Annealer [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:35, 2 May 2022 Dsbarth talk contribs changed protection level for Tousimis Critical Point Dryer [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:35, 2 May 2022 Dsbarth talk contribs changed protection level for ADT 7100 Dicing Saw [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:35, 2 May 2022 Dsbarth talk contribs changed protection level for K&S Wire Bonder [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:35, 2 May 2022 Dsbarth talk contribs changed protection level for EVG 620 Wafer Bond Aligner [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:35, 2 May 2022 Dsbarth talk contribs changed protection level for EVG 510 Wafer Bonder [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:35, 2 May 2022 Dsbarth talk contribs changed protection level for IPG IX280-DXF Green Micromachining Laser [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:34, 2 May 2022 Dsbarth talk contribs changed protection level for IPG IX-255 Excimer Micromachining Laser [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:34, 2 May 2022 Dsbarth talk contribs changed protection level for Zeiss Axio Imager M2m Microscopes [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:34, 2 May 2022 Dsbarth talk contribs changed protection level for Jandel Multi Height Four Point Probe [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:34, 2 May 2022 Dsbarth talk contribs changed protection level for Woollam V-VASE Ellipsometer [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:34, 2 May 2022 Dsbarth talk contribs changed protection level for Zygo NewView 7300 Optical Profilometer [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:34, 2 May 2022 Dsbarth talk contribs changed protection level for Filmetrics F40 [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:33, 2 May 2022 Dsbarth talk contribs changed protection level for Filmetrics F50 (White Light) [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:33, 2 May 2022 Dsbarth talk contribs changed protection level for Filmetrics F50 (UV Filter) [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:33, 2 May 2022 Dsbarth talk contribs changed protection level for KLA Tencor P7 2D&3D/stress profilometer [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:33, 2 May 2022 Dsbarth talk contribs changed protection level for KLA Tencor P7 2D profilometer [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:33, 2 May 2022 Dsbarth talk contribs changed protection level for SCS PDS2010 Parylene Coater [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:33, 2 May 2022 Dsbarth talk contribs changed protection level for ABM3000HR Mask Aligner [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:33, 2 May 2022 Dsbarth talk contribs changed protection level for Anatech SCE-106 Barrel Asher [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:33, 2 May 2022 Dsbarth talk contribs changed protection level for SUSS MicroTec AS8 AltaSpray [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:32, 2 May 2022 Dsbarth talk contribs changed protection level for Nanonex NX2600 Nanoimprint [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:32, 2 May 2022 Dsbarth talk contribs changed protection level for SUSS MicroTec MA6 Gen3 Mask Aligner [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:32, 2 May 2022 Dsbarth talk contribs changed protection level for Nanoscribe Photonic Professional GT [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:32, 2 May 2022 Dsbarth talk contribs changed protection level for Heidelberg DWL 66+ Laser Writer [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:32, 2 May 2022 Dsbarth talk contribs changed protection level for Litho Workstation for BEAMER and TRACER [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:31, 2 May 2022 Dsbarth talk contribs changed protection level for Elionix ELS-7500EX E-Beam Lithography System [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:31, 2 May 2022 Dsbarth talk contribs changed protection level for SPTS/Xactix XeF2 Isotropic Etcher [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:31, 2 May 2022 Dsbarth talk contribs changed protection level for Jupiter II RIE Plasma Etcher [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:31, 2 May 2022 Dsbarth talk contribs changed protection level for Oxford Cobra ICP Etcher [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:31, 2 May 2022 Dsbarth talk contribs changed protection level for Oxford 80 Plus RIE [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:31, 2 May 2022 Dsbarth talk contribs changed protection level for SPTS Si DRIE [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:31, 2 May 2022 Dsbarth talk contribs changed protection level for Anatech SCE-108 Barrel Asher [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:30, 2 May 2022 Dsbarth talk contribs changed protection level for Sandvik Furnace Stack [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:30, 2 May 2022 Dsbarth talk contribs changed protection level for Oxford PlasmaLab 100 PECVD [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:30, 2 May 2022 Dsbarth talk contribs changed protection level for Veeco Savannah 200 [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:30, 2 May 2022 Dsbarth talk contribs changed protection level for Cambridge Nanotech S200 ALD [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:30, 2 May 2022 Dsbarth talk contribs changed protection level for Denton Explorer14 Magnetron Sputterer [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:29, 2 May 2022 Dsbarth talk contribs changed protection level for Lesker PVD75 DC/RF Sputterer [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:29, 2 May 2022 Dsbarth talk contribs changed protection level for Lesker PVD75 E-beam Evaporator [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:29, 2 May 2022 Dsbarth talk contribs changed protection level for Lesker PVD75 E-Beam/Thermal Evaporator [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:28, 2 May 2022 Dsbarth talk contribs changed protection level for Lesker Nano-36 Thermal Evaporator [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 13:27, 2 May 2022 Dsbarth talk contribs changed protection level for Equipment [Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite) (hist)
- 14:54, 29 April 2022 Dsbarth talk contribs protected Feaz Kalamodeen [Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite) [cascading] (hist)
- 14:54, 29 April 2022 Dsbarth talk contribs protected Jarrett Gilinger [Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite) [cascading] (hist)
- 14:53, 29 April 2022 Dsbarth talk contribs protected Sam Azadi [Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite) [cascading] (hist)
- 14:52, 29 April 2022 Dsbarth talk contribs protected David Jones [Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite) [cascading] (hist)
- 14:52, 29 April 2022 Dsbarth talk contribs protected Gyuseok Kim [Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite) [cascading] (hist)
- 14:52, 29 April 2022 Dsbarth talk contribs protected Charles Veith [Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite) [cascading]
- 14:51, 29 April 2022 Dsbarth talk contribs protected Kyle Keenan [Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite) [cascading] (hist)
- 14:37, 29 April 2022 Dsbarth talk contribs protected MPT Corp. RTP-600S Rapid Thermal Annealer [Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite) [cascading] (hist)
- 14:36, 29 April 2022 Dsbarth talk contribs protected Tousimis Critical Point Dryer [Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite) [cascading] (hist)
- 14:34, 29 April 2022 Dsbarth talk contribs protected ADT 7100 Dicing Saw [Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite) [cascading] (hist)
- 14:34, 29 April 2022 Dsbarth talk contribs protected K&S Wire Bonder [Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite) [cascading] (hist)
- 14:34, 29 April 2022 Dsbarth talk contribs protected EVG 620 Wafer Bond Aligner [Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite) [cascading] (hist)
- 14:34, 29 April 2022 Dsbarth talk contribs protected EVG 510 Wafer Bonder [Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite) [cascading] (hist)
- 14:33, 29 April 2022 Dsbarth talk contribs protected IPG IX280-DXF Green Micromachining Laser [Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite) [cascading] (hist)