Difference between revisions of "Equipment"

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== Physical Vapor Deposition (PVD) ==
+
==Deposition==
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=== Evaporation ===
+
=== [[How PVD works|Physical Vapor Deposition (PVD)]] ===
 +
==== Evaporation ====
 
* '''PVD-01:''' [[Lesker Nano-36 Thermal Evaporator | Lesker Nano-36 Thermal Evaporator]]  
 
* '''PVD-01:''' [[Lesker Nano-36 Thermal Evaporator | Lesker Nano-36 Thermal Evaporator]]  
 
* '''PVD-02:''' [[Lesker PVD75 E-Beam/Thermal Evaporator | Lesker PVD75 E-Beam/Thermal Evaporator]]  
 
* '''PVD-02:''' [[Lesker PVD75 E-Beam/Thermal Evaporator | Lesker PVD75 E-Beam/Thermal Evaporator]]  
 
* '''PVD-04:''' [[Lesker PVD75 E-beam Evaporator | Lesker PVD75 E-beam Evaporator]]
 
* '''PVD-04:''' [[Lesker PVD75 E-beam Evaporator | Lesker PVD75 E-beam Evaporator]]
  
−
=== Sputtering ===
+
==== Sputtering ====
 
* '''PVD-03:''' [[Lesker PVD75 DC/RF Sputterer | Lesker PVD75 DC/RF Sputterer]]  
 
* '''PVD-03:''' [[Lesker PVD75 DC/RF Sputterer | Lesker PVD75 DC/RF Sputterer]]  
 
* '''PVD-05:''' [[Denton Explorer14 Magnetron Sputterer | Denton Explorer14 Magnetron Sputterer]]
 
* '''PVD-05:''' [[Denton Explorer14 Magnetron Sputterer | Denton Explorer14 Magnetron Sputterer]]
  
−
''PVD-07 is listed under Soft Lithography''
+
'' '''PVD-07''' is listed under Soft Lithography'' <br>
 +
'' '''PVD-08''' is listed under Soft Lithography''
  
−
== Chemical Vapor Deposition (CVD) ==
+
=== [[What is Chemical Vapor Deposition (CVD)?|Chemical Vapor Deposition (CVD)]] ===
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=== Atomic layer deposition (ALD) ===
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* '''CVD-01:''' [[Oxford PlasmaLab 100 PECVD | Oxford PlasmaLab 100 PECVD ]]
 +
* '''CVD-02 (Tube furnaces):''' [[Sandvik Furnace Stack | Sandvik Furnace Stack - SiO<sub>2</sub>, SiN<sub>x</sub>, Anneal tubes]]
 +
 
 +
=== [[What is Atomic Layer Deposition?|Atomic Layer Deposition (ALD)]] ===
 
* '''ALD-01:''' [[Cambridge Nanotech S200 ALD | Cambridge Nanotech S200 ALD]]
 
* '''ALD-01:''' [[Cambridge Nanotech S200 ALD | Cambridge Nanotech S200 ALD]]
 +
* '''ALD-02:''' [[Fiji G2 ALD | Fiji G2 ALD]]
 
* '''ALD-03:''' [[Veeco Savannah 200 | Veeco Savannah 200]]
 
* '''ALD-03:''' [[Veeco Savannah 200 | Veeco Savannah 200]]
  
−
=== Plasma Enhanced CVD (PECVD) ===
+
== Etching ==
−
* '''CVD-01:''' [[Oxford PlasmaLab 100 PECVD | Oxford PlasmaLab 100 PECVD ]]
 
  
−
=== Tube furnace ===
+
=== [[How plasma etch works|Plasma Etch]] ===
−
* '''CVD-02:''' [[Sandvik Furnace Stack | Sandvik Furnace Stack - SiO<sub>2</sub>, SiN<sub>x</sub>, Anneal tubes]]
 
−
 
 
−
== Etching ==
 
−
=== Plasma Etch ===
 
 
* '''DE-02:''' [[Anatech SCE-108 Barrel Asher |Anatech SCE-108 Barrel Asher]]
 
* '''DE-02:''' [[Anatech SCE-108 Barrel Asher |Anatech SCE-108 Barrel Asher]]
 
* '''DE-03:''' [[SPTS Si DRIE | SPTS Si DRIE]]   
 
* '''DE-03:''' [[SPTS Si DRIE | SPTS Si DRIE]]   
 
* '''DE-04:''' [[Oxford 80 Plus RIE | Oxford 80 Plus RIE]]
 
* '''DE-04:''' [[Oxford 80 Plus RIE | Oxford 80 Plus RIE]]
 
* '''DE-05:''' [[Oxford Cobra ICP Etcher | Oxford Cobra ICP Etcher]]
 
* '''DE-05:''' [[Oxford Cobra ICP Etcher | Oxford Cobra ICP Etcher]]
 +
* '' '''DE-07''' is listed under Soft Lithography''
 
* '''DE-08:''' [[Jupiter II RIE Plasma Etcher | Jupiter II RIE Plasma Etcher]]
 
* '''DE-08:''' [[Jupiter II RIE Plasma Etcher | Jupiter II RIE Plasma Etcher]]
  
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* '''EBL-01:''' [[ Elionix ELS-7500EX E-Beam Lithography System | Elionix ELS-7500EX E-Beam Lithography System ]]
 
* '''EBL-01:''' [[ Elionix ELS-7500EX E-Beam Lithography System | Elionix ELS-7500EX E-Beam Lithography System ]]
 
* '''EBL-02:''' [[Litho Workstation for BEAMER and TRACER | Litho Workstation for BEAMER and TRACER]]
 
* '''EBL-02:''' [[Litho Workstation for BEAMER and TRACER | Litho Workstation for BEAMER and TRACER]]
 +
* '''EBL-03:''' [[ Raith EBPG5200+ E-Beam Lithography System | Raith EBPG5200+ E-Beam Lithography System ]]
  
 
=== Laser Lithography ===
 
=== Laser Lithography ===
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=== Resist Coating ===
 
=== Resist Coating ===
 
* '''RC-01:''' [[SUSS MicroTec AS8 AltaSpray | SUSS MicroTec AS8 AltaSpray]]
 
* '''RC-01:''' [[SUSS MicroTec AS8 AltaSpray | SUSS MicroTec AS8 AltaSpray]]
−
* '''SPN-01:''' [[Spinner - Positive Resist (Left) - POLOS | Spinner - Positive Resist (Left) - Polos]]
+
* '''SPN-01:''' [[ Apogee Spinner - Positive Resist (Left) | Apogee Spinner - Positive Resist (Left)]] - No LOR/PMGI/Polyimide!
−
* '''SPN-03:''' Spinner - Positive Resist (Right)
+
* '''SPN-03:''' [[ Apogee Spinner - Positive Resist (Right) | Apogee Spinner - Positive Resist (Right)]]
−
* '''SPN-04:''' Spinner - Negative Resist (Left)
+
* '''SPN-04:''' ReynoldsTech Spinner - Negative Resist
−
* '''SPN-05:''' Spinner - Negative Resist (Right)
+
* '''SPN-06:''' [[ Apogee Spinner - E-Beam Resist | Apogee Spinner - E-Beam Resist]] - No LOR/PMGI/Polyimide!
−
* '''SPN-06:''' Spinner - E-Beam Resist Only
 
  
−
''SPN-07 is listed under Soft Lithography''
+
* '' '''SPN-07''' is listed under Back End Processing'' <br>
 +
* '' '''SPN-08''' is listed under Soft Lithography'' <br>
 +
* '' '''SPN-09''' is listed under Soft Lithography''
  
 
=== Soft Lithography ===
 
=== Soft Lithography ===
−
* '''SCE-106:''' [[Anatech SCE-106 Barrel Asher | Anatech SCE-106 Barrel Asher]]
+
* '''DE-07:''' [[Anatech SCE-106 Barrel Asher | Anatech SCE-106 Barrel Asher]]
 
* '''MA-03:''' [[ABM3000HR Mask Aligner | ABM3000HR Mask Aligner]]
 
* '''MA-03:''' [[ABM3000HR Mask Aligner | ABM3000HR Mask Aligner]]
 
* '''PVD-07:''' [[SCS PDS2010 Parylene Coater| SCS PDS2010 Parylene Coater]]
 
* '''PVD-07:''' [[SCS PDS2010 Parylene Coater| SCS PDS2010 Parylene Coater]]
−
* Silanization Dessicator
+
* '''PVD-08:''' Silanization Dessicator
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* '''SPN-07:''' [[Spinner - SU-8/PDMS | Spinner - SU-8/PDMS]]
 
  
 
== Metrology & characterization ==
 
== Metrology & characterization ==
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=== Optical profilometers ===
 
=== Optical profilometers ===
 
* '''MET-05:''' [[Filmetrics Profilm3D | Filmetrics Profilm3D]]
 
* '''MET-05:''' [[Filmetrics Profilm3D | Filmetrics Profilm3D]]
−
* '''MET-XX:''' [[Zygo NewView 7300 Optical Profilometer | Zygo NewView 7300 Optical Profilometer]]
 
  
 
=== Reflectometers ===
 
=== Reflectometers ===
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* '''BE-04:''' [[ADT 7100 Dicing Saw | ADT 7100 Dicing Saw]]
 
* '''BE-04:''' [[ADT 7100 Dicing Saw | ADT 7100 Dicing Saw]]
 
* '''BE-06:''' [[TPT HB100 Wire Bonder | TPT HB100 Wire Bonder]]
 
* '''BE-06:''' [[TPT HB100 Wire Bonder | TPT HB100 Wire Bonder]]
 +
* '''SPN-07:''' [[Spinner - SU-8/PDMS | CEE 200X Spinner]]
 
* Dimatix ink-Jet Printer
 
* Dimatix ink-Jet Printer
  

Revision as of 17:02, 8 April 2024

Deposition

Physical Vapor Deposition (PVD)

Evaporation

Sputtering

PVD-07 is listed under Soft Lithography
PVD-08 is listed under Soft Lithography

Chemical Vapor Deposition (CVD)

Atomic Layer Deposition (ALD)

Etching

Plasma Etch

Vapor/Wet Etch

Lithography

E-beam Lithography

Laser Lithography

Photolithography

Imprint Lithography

Resist Coating

  • SPN-07 is listed under Back End Processing
  • SPN-08 is listed under Soft Lithography
  • SPN-09 is listed under Soft Lithography

Soft Lithography

Metrology & characterization

Stylus profilometers

Optical profilometers

Reflectometers

Ellipsometer

Electrical characterization

Microscopes

Backend & Packaging

Thermal Processing

Wet Processing

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