Equipment

Physical Vapor Deposition (PVD)

Evaporation

• PVD-01: Lesker Nano-36 Thermal Evaporator
• PVD-02: Lesker PVD75 E-Beam/Thermal Evaporator
• PVD-04: Lesker PVD75 E-beam Evaporator

Sputtering

• PVD-03: Lesker PVD75 DC/RF Sputterer
• PVD-05: Denton Explorer14 Magnetron Sputterer

PVD-07 is listed under Soft Lithography

Chemical Vapor Deposition (CVD)

• ALD-01: Cambridge Nanotech S200 ALD
• ALD-03: Veeco Savannah 200
• CVD-01: Oxford PlasmaLab 100 PECVD
• CVD-02: Sandvik Furnace Stack - SiO₂, SiN_x, Anneal tubes

Etching

Plasma Etch

• DE-02: Anatech SCE-108 Barrel Asher
• DE-03: SPTS Si DRIE
• DE-04: Oxford 80 Plus RIE
• DE-05: Oxford Cobra ICP Etcher
• DE-08: Jupiter II RIE Plasma Etcher

Vapor / Wet Etch

• DE-06: SPTS/Xactix XeF2 Isotropic Etcher

Lithography

E-beam Lithography

• EBL-01: Elionix ELS-7500EX E-Beam Lithography System
• EBL-02: Litho Workstation for BEAMER and TRACER

Laser Lithography

• LW-01: Heidelberg DWL 66+ Laser Writer
• LW-02: Nanoscribe Photonic Professional GT

Photolithography

• MA-01: SUSS MicroTec MA6 Gen3 Mask Aligner

Imprint Lithography

• MA-02: Nanonex NX2600 Nanoimprint

Resist Coating

• RC-01: SUSS MicroTec AS8 AltaSpray
• Spinner - Positive Resist (Left) - 4" Wafer Only
• Spinner - Positive Resist (Right) - Small Piece Only
• Spinner - Negative Resist (Left)
• Spinner - Negative Resist (Right)
• Spinner - E-Beam Resist Only

Soft Lithography

• SCE-106: Anatech SCE-106 Barrel Asher
• MA-03: ABM3000HR Mask Aligner
• PVD-07: SCS PDS2010 Parylene Coater
• Silanization Dessicator
• Spinner - SU-8/PDMS

Metrology

• MET-01: KLA Tencor P7 2D profilometer
• MET-02: KLA Tencor P7 2D&3D/stress profilometer
• MET-03: Filmetrics F50 (UV Filter)
• MET-11: Filmetrics F50 (White Light)
• MET-04: Filmetrics F40
• MET-05: Zygo NewView 7300 Optical Profilometer
• MET-06: Woollam V-VASE Ellipsometer
• MET-08: Jandel Multi Height Four Point Probe
• MET-12/13/14/15: Zeiss Axio Imager M2m Microscopes
• Micromanipulator 4060 Probe Station

Backend & Packaging

• IPG IX-255 Excimer Micromachining Laser
• IPG IX280-DXF Green Micromachining Laser
• EVG 510 Wafer Bonder
• EVG 620 Wafer Bond Aligner
• K&S Wire Bonder
• ADT 7100 Dicing Saw
• Tousimis Critical Point Dryer
• Dimatix ink-Jet Printer

Thermal Processing

• MPT Corp. RTP-600S Rapid Thermal Annealer
• Sandvik Anneal Furnace 1
• Sandvik Anneal Furnace 2