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- 14:10, 3 January 2024 diff hist 0 Raith EBPG5200+ E-Beam Lithography System update to NEMO
- 14:10, 3 January 2024 diff hist 0 Litho Workstation for BEAMER and TRACER update to NEMO current
- 14:09, 3 January 2024 diff hist 0 Elionix ELS-7500EX E-Beam Lithography System update to NEMO current
- 14:09, 3 January 2024 diff hist 0 SPTS/Xactix XeF2 Isotropic Etcher update to NEMO current
- 14:09, 3 January 2024 diff hist 0 Jupiter II RIE Plasma Etcher update to NEMO current
- 14:08, 3 January 2024 diff hist 0 Oxford Cobra ICP Etcher update to NEMO current
- 14:08, 3 January 2024 diff hist 0 Oxford 80 Plus RIE update to NEMO
- 14:08, 3 January 2024 diff hist 0 SPTS Si DRIE update to NEMO
- 14:08, 3 January 2024 diff hist 0 Anatech SCE-108 Barrel Asher update to NEMO current
- 14:07, 3 January 2024 diff hist 0 Sandvik Furnace Stack update to NEMO
- 14:07, 3 January 2024 diff hist 0 Oxford PlasmaLab 100 PECVD update to NEMO
- 13:55, 3 January 2024 diff hist 0 Veeco Savannah 200 update to NEMO
- 13:55, 3 January 2024 diff hist 0 Cambridge Nanotech S200 ALD update to NEMO
- 13:54, 3 January 2024 diff hist 0 Denton Explorer14 Magnetron Sputterer update to NEMO
- 13:54, 3 January 2024 diff hist 0 Lesker PVD75 DC/RF Sputterer update to NEMO
- 13:54, 3 January 2024 diff hist 0 Lesker PVD75 E-beam Evaporator update to NEMO
- 13:54, 3 January 2024 diff hist 0 Lesker PVD75 E-Beam/Thermal Evaporator update to NEMO current
- 13:54, 3 January 2024 diff hist 0 Lesker Nano-36 Thermal Evaporator update to NEMO current
- 13:53, 3 January 2024 diff hist 0 Spinner - Positive Resist (Left) - POLOS current
- 13:53, 3 January 2024 diff hist 0 Template:EquipmentInfo update to NEMO current
- 13:52, 3 January 2024 diff hist +1 Spinner - Positive Resist (Left) - POLOS Removed from cleanroom
- 13:51, 3 January 2024 diff hist -23 Spinner - Positive Resist (Left) - POLOS Removed from cleanroom
- 13:49, 3 January 2024 diff hist +14 SUSS MicroTec AS8 AltaSpray update tool owner
- 13:48, 3 January 2024 diff hist +18 m Nanonex NX2600 Nanoimprint
- 13:48, 3 January 2024 diff hist +14 SUSS MicroTec MA6 Gen3 Mask Aligner update tool owner
- 13:47, 3 January 2024 diff hist +14 Nanoscribe Photonic Professional GT update tool owner
- 13:47, 3 January 2024 diff hist +14 Heidelberg DWL 66+ Laser Writer update tool owner
- 13:47, 3 January 2024 diff hist +18 m Raith EBPG5200+ E-Beam Lithography System
- 13:47, 3 January 2024 diff hist +18 m Litho Workstation for BEAMER and TRACER
- 13:46, 3 January 2024 diff hist +18 m Elionix ELS-7500EX E-Beam Lithography System
- 13:46, 3 January 2024 diff hist +16 m SPTS/Xactix XeF2 Isotropic Etcher
- 13:45, 3 January 2024 diff hist +18 m Jupiter II RIE Plasma Etcher
- 13:45, 3 January 2024 diff hist +16 m Oxford Cobra ICP Etcher
- 13:44, 3 January 2024 diff hist +16 m Oxford 80 Plus RIE
- 13:44, 3 January 2024 diff hist +16 m SPTS Si DRIE
- 13:44, 3 January 2024 diff hist +20 Anatech SCE-108 Barrel Asher update tool owner
- 13:43, 3 January 2024 diff hist +16 m Sandvik Furnace Stack
- 13:43, 3 January 2024 diff hist +16 m Oxford PlasmaLab 100 PECVD
- 13:43, 3 January 2024 diff hist +16 m Veeco Savannah 200
- 13:42, 3 January 2024 diff hist +16 m Cambridge Nanotech S200 ALD
- 13:42, 3 January 2024 diff hist -26 Denton Explorer14 Magnetron Sputterer update tool owner
- 13:41, 3 January 2024 diff hist -22 Lesker PVD75 DC/RF Sputterer update tool owner
- 13:41, 3 January 2024 diff hist -22 Lesker PVD75 E-beam Evaporator update tool owner
- 13:40, 3 January 2024 diff hist -22 Lesker PVD75 E-Beam/Thermal Evaporator
- 13:40, 3 January 2024 diff hist -22 Lesker Nano-36 Thermal Evaporator update tool owner
- 13:38, 3 January 2024 diff hist +218 QNF Equipment Owner Matrix Updating to current responsibilities, removing David Jones, Jason Rohr
- 13:18, 3 January 2024 diff hist +22 Quattrone Nanofabrication Facility →Equipment
- 18:29, 22 December 2023 diff hist +297 SUSS MicroTec MA6 Gen3 Mask Aligner →SOPs & Troubleshooting: Include common issue with user management software
- 12:34, 22 December 2023 diff hist 0 Heidelberg DWL 66+ Laser Writer →Processes: Incorrectly updated filter value, not focus value
- 15:31, 20 December 2023 diff hist +60 Raith EBPG5200+ E-Beam Lithography System Update SOP location