User contributions
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- 13:14, 3 January 2024 diff hist +17 SCS PDS2010 Parylene Coater update to NEMO
- 13:14, 3 January 2024 diff hist +12 ABM3000HR Mask Aligner update tool owner, update to NEMO
- 13:13, 3 January 2024 diff hist 0 Anatech SCE-106 Barrel Asher update tool owner
- 13:13, 3 January 2024 diff hist +16 Anatech SCE-106 Barrel Asher update to NEMO
- 13:13, 3 January 2024 diff hist -30 Equipment →Resist Coating: Update to current spinners
- 13:12, 3 January 2024 diff hist 0 SUSS MicroTec AS8 AltaSpray update to NEMO
- 13:11, 3 January 2024 diff hist 0 Nanonex NX2600 Nanoimprint update to NEMO
- 13:11, 3 January 2024 diff hist 0 SUSS MicroTec MA6 Gen3 Mask Aligner update to NEMO
- 13:11, 3 January 2024 diff hist 0 Nanoscribe Photonic Professional GT update to NEMO
- 13:11, 3 January 2024 diff hist 0 Heidelberg DWL 66+ Laser Writer update to NEMO
- 13:10, 3 January 2024 diff hist 0 Raith EBPG5200+ E-Beam Lithography System update to NEMO
- 13:10, 3 January 2024 diff hist 0 Litho Workstation for BEAMER and TRACER update to NEMO
- 13:09, 3 January 2024 diff hist 0 Elionix ELS-7500EX E-Beam Lithography System update to NEMO
- 13:09, 3 January 2024 diff hist 0 SPTS/Xactix XeF2 Isotropic Etcher update to NEMO
- 13:09, 3 January 2024 diff hist 0 Jupiter II RIE Plasma Etcher update to NEMO current
- 13:08, 3 January 2024 diff hist 0 Oxford Cobra ICP Etcher update to NEMO current
- 13:08, 3 January 2024 diff hist 0 Oxford 80 Plus RIE update to NEMO
- 13:08, 3 January 2024 diff hist 0 SPTS Si DRIE update to NEMO
- 13:08, 3 January 2024 diff hist 0 Anatech SCE-108 Barrel Asher update to NEMO current
- 13:07, 3 January 2024 diff hist 0 Sandvik Furnace Stack update to NEMO
- 13:07, 3 January 2024 diff hist 0 Oxford PlasmaLab 100 PECVD update to NEMO
- 12:55, 3 January 2024 diff hist 0 Veeco Savannah 200 update to NEMO
- 12:55, 3 January 2024 diff hist 0 Cambridge Nanotech S200 ALD update to NEMO
- 12:54, 3 January 2024 diff hist 0 Denton Explorer14 Magnetron Sputterer update to NEMO
- 12:54, 3 January 2024 diff hist 0 Lesker PVD75 DC/RF Sputterer update to NEMO
- 12:54, 3 January 2024 diff hist 0 Lesker PVD75 E-beam Evaporator update to NEMO
- 12:54, 3 January 2024 diff hist 0 Lesker PVD75 E-Beam/Thermal Evaporator update to NEMO current
- 12:54, 3 January 2024 diff hist 0 Lesker Nano-36 Thermal Evaporator update to NEMO current
- 12:53, 3 January 2024 diff hist 0 Spinner - Positive Resist (Left) - POLOS current
- 12:53, 3 January 2024 diff hist 0 Template:EquipmentInfo update to NEMO current
- 12:52, 3 January 2024 diff hist +1 Spinner - Positive Resist (Left) - POLOS Removed from cleanroom
- 12:51, 3 January 2024 diff hist -23 Spinner - Positive Resist (Left) - POLOS Removed from cleanroom
- 12:49, 3 January 2024 diff hist +14 SUSS MicroTec AS8 AltaSpray update tool owner
- 12:48, 3 January 2024 diff hist +18 m Nanonex NX2600 Nanoimprint
- 12:48, 3 January 2024 diff hist +14 SUSS MicroTec MA6 Gen3 Mask Aligner update tool owner
- 12:47, 3 January 2024 diff hist +14 Nanoscribe Photonic Professional GT update tool owner
- 12:47, 3 January 2024 diff hist +14 Heidelberg DWL 66+ Laser Writer update tool owner
- 12:47, 3 January 2024 diff hist +18 m Raith EBPG5200+ E-Beam Lithography System
- 12:47, 3 January 2024 diff hist +18 m Litho Workstation for BEAMER and TRACER
- 12:46, 3 January 2024 diff hist +18 m Elionix ELS-7500EX E-Beam Lithography System
- 12:46, 3 January 2024 diff hist +16 m SPTS/Xactix XeF2 Isotropic Etcher
- 12:45, 3 January 2024 diff hist +18 m Jupiter II RIE Plasma Etcher
- 12:45, 3 January 2024 diff hist +16 m Oxford Cobra ICP Etcher
- 12:44, 3 January 2024 diff hist +16 m Oxford 80 Plus RIE
- 12:44, 3 January 2024 diff hist +16 m SPTS Si DRIE
- 12:44, 3 January 2024 diff hist +20 Anatech SCE-108 Barrel Asher update tool owner
- 12:43, 3 January 2024 diff hist +16 m Sandvik Furnace Stack
- 12:43, 3 January 2024 diff hist +16 m Oxford PlasmaLab 100 PECVD
- 12:43, 3 January 2024 diff hist +16 m Veeco Savannah 200
- 12:42, 3 January 2024 diff hist +16 m Cambridge Nanotech S200 ALD