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- 15:23, 27 September 2023 diff hist +52 Lesker PVD75 DC/RF Sputterer →DC deposition
- 10:08, 18 August 2023 diff hist -45 Denton Explorer14 Magnetron Sputterer →Process data & master recipes
- 10:08, 18 August 2023 diff hist +13 Denton Explorer14 Magnetron Sputterer →Process data & master recipes
- 10:07, 18 August 2023 diff hist 0 Denton Explorer14 Magnetron Sputterer →Process data & master recipes
- 16:50, 27 June 2023 diff hist +11 Lesker PVD75 DC/RF Sputterer →DC deposition
- 10:52, 25 April 2023 diff hist +2 Denton Explorer14 Magnetron Sputterer →Process data & master recipes
- 10:51, 25 April 2023 diff hist +30 Denton Explorer14 Magnetron Sputterer →Process data & master recipes
- 10:24, 5 April 2023 diff hist +39 Lesker PVD75 DC/RF Sputterer →DC deposition
- 13:49, 7 March 2023 diff hist +97 Lesker PVD75 DC/RF Sputterer →Deposition sources
- 13:46, 7 March 2023 diff hist +28 Denton Explorer14 Magnetron Sputterer →Process data & master recipes
- 17:46, 6 March 2023 diff hist +37 Lesker PVD75 DC/RF Sputterer →DC deposition
- 17:45, 6 March 2023 diff hist +40 Lesker PVD75 DC/RF Sputterer →DC deposition
- 17:43, 6 March 2023 diff hist +37 Lesker PVD75 DC/RF Sputterer →DC deposition
- 13:13, 27 February 2023 diff hist +39 Lesker PVD75 DC/RF Sputterer →RF deposition
- 13:12, 27 February 2023 diff hist +34 Lesker PVD75 DC/RF Sputterer →DC & RF sputtering process data
- 16:52, 2 February 2023 diff hist +38 Lesker PVD75 DC/RF Sputterer →DC deposition
- 13:39, 31 January 2023 diff hist -10 W master recipe current
- 12:35, 31 January 2023 diff hist +705 W master recipe
- 12:32, 31 January 2023 diff hist +801 Pt master recipe current
- 12:31, 31 January 2023 diff hist +35 Au master recipe current
- 12:30, 31 January 2023 diff hist +743 Au master recipe
- 12:27, 31 January 2023 diff hist +876 Ag master recipe current
- 15:03, 30 January 2023 diff hist +30 W master recipe
- 15:03, 30 January 2023 diff hist +30 Ti master recipe current
- 15:02, 30 January 2023 diff hist +30 Pt master recipe
- 15:02, 30 January 2023 diff hist +30 Mo master recipe current
- 15:02, 30 January 2023 diff hist +30 Cu master recipe current
- 15:02, 30 January 2023 diff hist +30 Au master recipe
- 15:02, 30 January 2023 diff hist +30 Al master recipe current
- 15:01, 30 January 2023 diff hist +30 Ag master recipe
- 15:00, 30 January 2023 diff hist +18 W master recipe
- 15:00, 30 January 2023 diff hist +18 Ti master recipe
- 14:59, 30 January 2023 diff hist -9 Pt master recipe
- 14:59, 30 January 2023 diff hist -11 Mo master recipe
- 14:59, 30 January 2023 diff hist +2,063 Mo master recipe
- 14:59, 30 January 2023 diff hist -2,063 Denton Explorer14 Magnetron Sputterer →Molybdenum (Mo)
- 14:58, 30 January 2023 diff hist +18 Cu master recipe
- 14:58, 30 January 2023 diff hist +18 Au master recipe
- 14:58, 30 January 2023 diff hist +18 Al master recipe
- 14:58, 30 January 2023 diff hist -2 Ag master recipe
- 14:58, 30 January 2023 diff hist +6 Ag master recipe
- 14:57, 30 January 2023 diff hist +6 Ag master recipe
- 14:57, 30 January 2023 diff hist +8 Ag master recipe
- 14:56, 30 January 2023 diff hist +37 W master recipe
- 14:56, 30 January 2023 diff hist +2,058 N W master recipe W master recipe
- 14:55, 30 January 2023 diff hist +22 Denton Explorer14 Magnetron Sputterer →Process data & master recipes
- 14:55, 30 January 2023 diff hist -2,060 Denton Explorer14 Magnetron Sputterer →Tungsten (W)
- 14:55, 30 January 2023 diff hist +2,061 Pt master recipe
- 14:54, 30 January 2023 diff hist -2,061 Denton Explorer14 Magnetron Sputterer →Platinum (Pt)
- 14:54, 30 January 2023 diff hist +2,057 Au master recipe
- 14:54, 30 January 2023 diff hist -2,057 Denton Explorer14 Magnetron Sputterer →Gold (Au)
- 14:54, 30 January 2023 diff hist +2,065 Cu master recipe
- 14:54, 30 January 2023 diff hist -2,091 Denton Explorer14 Magnetron Sputterer →Copper (Cu)
- 14:53, 30 January 2023 diff hist +2,065 Al master recipe
- 14:53, 30 January 2023 diff hist -2,092 Denton Explorer14 Magnetron Sputterer →Aluminum (Al)
- 14:53, 30 January 2023 diff hist -2,089 Denton Explorer14 Magnetron Sputterer →Titanium (Ti)
- 14:53, 30 January 2023 diff hist +2,062 Ti master recipe
- 14:52, 30 January 2023 diff hist +61 N Ti master recipe Ti master recipe
- 14:51, 30 January 2023 diff hist +61 N Pt master recipe Pt master recipe
- 14:51, 30 January 2023 diff hist +61 N Mo master recipe Mo master recipe
- 14:51, 30 January 2023 diff hist +61 N Cu master recipe Cu master recipe
- 14:51, 30 January 2023 diff hist +61 N Au master recipe Au master recipe
- 14:49, 30 January 2023 diff hist +61 Al master recipe
- 14:49, 30 January 2023 diff hist +63 Ag master recipe
- 14:48, 30 January 2023 diff hist 0 N Al master recipe Al master recipe
- 14:46, 30 January 2023 diff hist +116 Denton Explorer14 Magnetron Sputterer →Process data & master recipes
- 14:45, 30 January 2023 diff hist +23 Denton Explorer14 Magnetron Sputterer →Process data & master recipes
- 14:44, 30 January 2023 diff hist +15 Denton Explorer14 Magnetron Sputterer →Process data & master recipes
- 14:44, 30 January 2023 diff hist -7 Denton Explorer14 Magnetron Sputterer →Available materials & process data
- 14:43, 30 January 2023 diff hist +8 Denton Explorer14 Magnetron Sputterer →Available materials & process data
- 14:42, 30 January 2023 diff hist +69 Denton Explorer14 Magnetron Sputterer →Available materials & process data
- 14:42, 30 January 2023 diff hist -2,137 Denton Explorer14 Magnetron Sputterer →Master recipes
- 14:42, 30 January 2023 diff hist -25 Ag master recipe →Silver (Ag)
- 14:41, 30 January 2023 diff hist +2,136 Ag master recipe
- 14:41, 30 January 2023 diff hist +23 Denton Explorer14 Magnetron Sputterer
- 14:39, 30 January 2023 diff hist 0 N Ag master recipe Ag master recipe
- 17:23, 25 January 2023 diff hist -43 Denton Explorer14 Magnetron Sputterer →Available materials & process data
- 12:39, 25 January 2023 diff hist +72 Denton Explorer14 Magnetron Sputterer →Master recipes
- 12:38, 25 January 2023 diff hist +79 Denton Explorer14 Magnetron Sputterer →Copper (Cu)
- 12:38, 25 January 2023 diff hist 0 Denton Explorer14 Magnetron Sputterer →Copper (Cu)
- 12:37, 25 January 2023 diff hist 0 Denton Explorer14 Magnetron Sputterer →Aluminum (Al)
- 12:36, 25 January 2023 diff hist -48 Denton Explorer14 Magnetron Sputterer →Copper (Cu)
- 12:35, 25 January 2023 diff hist 0 Denton Explorer14 Magnetron Sputterer →Titanium (Ti)
- 12:34, 25 January 2023 diff hist +8 Denton Explorer14 Magnetron Sputterer →Aluminum (Al)
- 12:34, 25 January 2023 diff hist +78 Denton Explorer14 Magnetron Sputterer →Titanium (Ti)
- 12:33, 25 January 2023 diff hist -1 Denton Explorer14 Magnetron Sputterer →Aluminum (Al)
- 12:33, 25 January 2023 diff hist -50 Denton Explorer14 Magnetron Sputterer →Titanium (Ti)
- 12:23, 25 January 2023 diff hist +71 Denton Explorer14 Magnetron Sputterer →Aluminum (Al)
- 12:22, 25 January 2023 diff hist -61 Denton Explorer14 Magnetron Sputterer →Aluminum (Al)
- 12:15, 25 January 2023 diff hist +14 Denton Explorer14 Magnetron Sputterer →Aluminum (Al)
- 16:48, 24 January 2023 diff hist 0 Denton Explorer14 Magnetron Sputterer →Silver (Ag)
- 16:47, 24 January 2023 diff hist +79 Denton Explorer14 Magnetron Sputterer →Silver (Ag)
- 16:46, 24 January 2023 diff hist +260 Denton Explorer14 Magnetron Sputterer →Master recipes
- 16:44, 24 January 2023 diff hist -1 Denton Explorer14 Magnetron Sputterer →Description
- 16:44, 24 January 2023 diff hist +745 Denton Explorer14 Magnetron Sputterer →Main differences between PVD-05 (this tool) and PVD-03
- 16:39, 24 January 2023 diff hist +174 Denton Explorer14 Magnetron Sputterer →Description
- 16:35, 24 January 2023 diff hist +33 Denton Explorer14 Magnetron Sputterer →Resources
- 16:34, 24 January 2023 diff hist +177 Denton Explorer14 Magnetron Sputterer →Master recipes
- 16:33, 24 January 2023 diff hist +136 Denton Explorer14 Magnetron Sputterer →Master recipes
- 16:32, 24 January 2023 diff hist +2,063 Denton Explorer14 Magnetron Sputterer →Master recipes
- 16:30, 24 January 2023 diff hist +12,204 Denton Explorer14 Magnetron Sputterer →Master recipes
- 16:29, 24 January 2023 diff hist +167 Denton Explorer14 Magnetron Sputterer →Master recipes
- 17:41, 23 January 2023 diff hist +142 Denton Explorer14 Magnetron Sputterer →Description
- 17:38, 23 January 2023 diff hist -4 Denton Explorer14 Magnetron Sputterer →Maximum power
- 17:38, 23 January 2023 diff hist +84 Denton Explorer14 Magnetron Sputterer →Maximum power
- 17:37, 23 January 2023 diff hist +2 Denton Explorer14 Magnetron Sputterer →Maximum power
- 17:37, 23 January 2023 diff hist -1 Denton Explorer14 Magnetron Sputterer →Available materials & process data
- 17:37, 23 January 2023 diff hist -142 Denton Explorer14 Magnetron Sputterer →Description
- 17:36, 23 January 2023 diff hist -11 Denton Explorer14 Magnetron Sputterer →Deposition Sources
- 17:36, 23 January 2023 diff hist +28 Denton Explorer14 Magnetron Sputterer →Description
- 17:35, 23 January 2023 diff hist -1 Denton Explorer14 Magnetron Sputterer →Description
- 17:35, 23 January 2023 diff hist +1 Denton Explorer14 Magnetron Sputterer →Maximum power
- 17:35, 23 January 2023 diff hist +25 Denton Explorer14 Magnetron Sputterer →Description
- 17:35, 23 January 2023 diff hist +51 Denton Explorer14 Magnetron Sputterer →Available materials & process data
- 17:34, 23 January 2023 diff hist +2 Denton Explorer14 Magnetron Sputterer →Master recipes
- 17:34, 23 January 2023 diff hist -2 Denton Explorer14 Magnetron Sputterer →Master recipes
- 17:12, 23 January 2023 diff hist +2,034 Denton Explorer14 Magnetron Sputterer →Master recipes
- 16:43, 23 January 2023 diff hist +35 Denton Explorer14 Magnetron Sputterer
- 17:45, 4 January 2023 diff hist +29 Denton Explorer14 Magnetron Sputterer →Available materials & process data
- 17:44, 4 January 2023 diff hist +116 Denton Explorer14 Magnetron Sputterer →Available materials & process data
- 17:41, 4 January 2023 diff hist +48 Denton Explorer14 Magnetron Sputterer →Available materials & process data
- 17:39, 4 January 2023 diff hist -562 Denton Explorer14 Magnetron Sputterer →Available materials & process data
- 17:36, 4 January 2023 diff hist +207 Denton Explorer14 Magnetron Sputterer →Available materials & process data
- 17:31, 4 January 2023 diff hist +503 Denton Explorer14 Magnetron Sputterer →RF deposition
- 17:29, 4 January 2023 diff hist +24 Denton Explorer14 Magnetron Sputterer →RF deposition
- 17:28, 4 January 2023 diff hist +419 Denton Explorer14 Magnetron Sputterer →Description
- 17:24, 4 January 2023 diff hist -16 Lesker PVD75 DC/RF Sputterer →RF deposition
- 17:19, 4 January 2023 diff hist -2 Lesker PVD75 DC/RF Sputterer →Additional resources
- 17:19, 4 January 2023 diff hist +33 Lesker PVD75 DC/RF Sputterer →DC & RF sputtering process data
- 17:18, 4 January 2023 diff hist +17 Lesker PVD75 DC/RF Sputterer →Process data
- 17:12, 4 January 2023 diff hist +2,799 Lesker PVD75 DC/RF Sputterer
- 14:00, 23 December 2022 diff hist +109 Lesker Nano-36 Thermal Evaporator →Resources
- 14:00, 23 December 2022 diff hist +2 Lesker PVD75 E-Beam/Thermal Evaporator →Resources
- 13:59, 23 December 2022 diff hist +107 Lesker PVD75 E-Beam/Thermal Evaporator →Resources
- 13:56, 23 December 2022 diff hist +7 Lesker PVD75 DC/RF Sputterer
- 13:56, 23 December 2022 diff hist +6 Lesker PVD75 E-beam Evaporator
- 13:55, 23 December 2022 diff hist +7 Lesker PVD75 E-Beam/Thermal Evaporator
- 13:55, 23 December 2022 diff hist +47 Lesker Nano-36 Thermal Evaporator
- 16:12, 25 October 2022 diff hist +2 Denton Explorer14 Magnetron Sputterer →Resources
- 10:47, 17 October 2022 diff hist -5 Lesker PVD75 E-beam Evaporator
- 09:45, 28 September 2022 diff hist -16 Lesker PVD75 DC/RF Sputterer
- 09:59, 20 September 2022 diff hist +14 Lesker Nano-36 Thermal Evaporator →Deposition Sources
- 09:48, 20 September 2022 diff hist +38 Lesker PVD75 E-Beam/Thermal Evaporator →PROHIBITED MATERIALS
- 09:47, 20 September 2022 diff hist 0 Lesker PVD75 E-Beam/Thermal Evaporator →PROHIBITED MATERIALS
- 09:46, 20 September 2022 diff hist +26 Lesker PVD75 E-Beam/Thermal Evaporator →Deposition Sources
- 09:45, 20 September 2022 diff hist +1 Lesker PVD75 E-Beam/Thermal Evaporator →Deposition Sources
- 09:45, 20 September 2022 diff hist 0 Lesker PVD75 E-Beam/Thermal Evaporator →Deposition Sources
- 09:43, 20 September 2022 diff hist +86 Lesker PVD75 E-Beam/Thermal Evaporator →Deposition Sources
- 09:55, 14 September 2022 diff hist +228 Lesker PVD75 DC/RF Sputterer
- 09:46, 14 September 2022 diff hist +136 Lesker PVD75 E-beam Evaporator
- 09:44, 14 September 2022 diff hist +15 Lesker PVD75 E-beam Evaporator
- 09:43, 14 September 2022 diff hist +297 Lesker PVD75 E-beam Evaporator →Description
- 09:40, 14 September 2022 diff hist +37 Lesker PVD75 E-beam Evaporator →Resources
- 09:31, 14 September 2022 diff hist +229 Lesker PVD75 E-Beam/Thermal Evaporator
- 16:08, 12 September 2022 diff hist 0 QNF Staff
- 15:11, 24 August 2022 diff hist +16 Denton Explorer14 Magnetron Sputterer
- 15:11, 24 August 2022 diff hist +16 Lesker PVD75 DC/RF Sputterer
- 15:11, 24 August 2022 diff hist +15 Lesker PVD75 E-Beam/Thermal Evaporator
- 15:10, 24 August 2022 diff hist -19 Lesker PVD75 E-beam Evaporator
- 15:06, 24 August 2022 diff hist +34 Lesker PVD75 E-beam Evaporator
- 14:54, 24 August 2022 diff hist +21 Denton Explorer14 Magnetron Sputterer
- 14:54, 24 August 2022 diff hist +21 Lesker PVD75 DC/RF Sputterer
- 14:53, 24 August 2022 diff hist +22 Lesker PVD75 E-beam Evaporator
- 14:53, 24 August 2022 diff hist +22 Lesker PVD75 E-Beam/Thermal Evaporator
- 14:52, 24 August 2022 diff hist -2 Jason A. Röhr current
- 14:50, 24 August 2022 diff hist +13 Jason A. Röhr
- 14:50, 24 August 2022 diff hist +40 Jason A. Röhr
- 14:31, 24 August 2022 diff hist +3 Denton Explorer14 Magnetron Sputterer
- 14:31, 24 August 2022 diff hist +3 Lesker PVD75 E-beam Evaporator
- 14:30, 24 August 2022 diff hist +3 Lesker PVD75 DC/RF Sputterer
- 14:29, 24 August 2022 diff hist +3 Lesker PVD75 E-Beam/Thermal Evaporator
- 14:29, 24 August 2022 diff hist +1 Denton Explorer14 Magnetron Sputterer
- 14:28, 24 August 2022 diff hist +1 Denton Explorer14 Magnetron Sputterer
- 13:35, 8 August 2022 diff hist +9 QNF Equipment Owner Matrix
- 13:23, 8 August 2022 diff hist +1,025 N Jason A. Röhr Created page with "'''Role in the QNF & Prior Experience''' Jason A. Röhr is a Principal Scientist at the Singh Center for Nanotechnology at the University of Pennsylvania (Penn). He is respon..."
- 13:06, 8 August 2022 diff hist +12 QNF Staff
- 13:05, 8 August 2022 diff hist +52 QNF Staff
- 09:18, 18 July 2022 diff hist 0 Lesker PVD75 DC/RF Sputterer
- 12:11, 12 July 2022 diff hist +24 Lesker PVD75 DC/RF Sputterer →Tool description
- 10:00, 12 July 2022 diff hist +109 Lesker PVD75 DC/RF Sputterer
- 09:59, 12 July 2022 diff hist +2,360 Lesker PVD75 DC/RF Sputterer
- 13:59, 8 July 2022 diff hist +139 Equipment →Metrology & characterization
- 13:53, 8 July 2022 diff hist -10 Equipment →Lithography
- 13:53, 8 July 2022 diff hist -4 Equipment →Vapor / Wet Etch
- 13:53, 8 July 2022 diff hist -4 Equipment →Plasma Etch
- 13:52, 8 July 2022 diff hist -4 Equipment →Tube furnace
- 13:52, 8 July 2022 diff hist -4 Equipment →Plasma Enhanced CVD (PECVD)
- 13:52, 8 July 2022 diff hist -4 Equipment →Atomic layer deposition (ALD)
- 13:52, 8 July 2022 diff hist -4 Equipment →Sputtering
- 13:52, 8 July 2022 diff hist -4 Equipment →Evaporation
- 13:51, 8 July 2022 diff hist +45 Equipment →Resist Coating
- 13:50, 8 July 2022 diff hist -2 Equipment →Soft Lithography
- 13:50, 8 July 2022 diff hist +16 Equipment →Soft Lithography
- 13:50, 8 July 2022 diff hist -36 Equipment →Resist Coating
- 13:49, 8 July 2022 diff hist +357 Equipment →Metrology & characterization
- 13:45, 8 July 2022 diff hist +106 Equipment →Resist Coating
- 13:40, 8 July 2022 diff hist +93 Equipment →Backend & Packaging
- 13:37, 8 July 2022 diff hist +108 Equipment →Chemical Vapor Deposition (CVD)
- 13:34, 8 July 2022 diff hist +19 Equipment →Metrology
- 13:34, 8 July 2022 diff hist +18 Equipment →Soft Lithography
- 13:33, 8 July 2022 diff hist +42 Equipment →Lithography
- 13:33, 8 July 2022 diff hist +36 Equipment →Etching
- 13:32, 8 July 2022 diff hist +24 Equipment →Chemical Vapor Deposition (CVD)
- 13:32, 8 July 2022 diff hist +30 Equipment →Physical Vapor Deposition (PVD)
- 13:31, 8 July 2022 diff hist +134 Equipment →Metrology
- 13:28, 8 July 2022 diff hist +45 Equipment →Physical Vapor Deposition (PVD)
- 13:25, 8 July 2022 diff hist 0 ABM3000HR Mask Aligner
- 13:25, 8 July 2022 diff hist 0 Equipment →Soft Lithography
- 13:24, 8 July 2022 diff hist +24 Equipment →Soft Lithography
- 13:23, 8 July 2022 diff hist 0 Equipment →Chemical vapor deposition (CVD)
- 13:22, 8 July 2022 diff hist 0 Equipment →Physical vapor deposition (PVD)
- 13:22, 8 July 2022 diff hist +7 Equipment →Imprint Lithography
- 13:22, 8 July 2022 diff hist +7 Equipment →Photolithography
- 13:21, 8 July 2022 diff hist +7 Equipment →Resist Coating
- 13:21, 8 July 2022 diff hist +14 Equipment →Laser Lithography
- 13:20, 8 July 2022 diff hist +16 Equipment →E-beam Lithography
- 13:19, 8 July 2022 diff hist +7 Equipment →Vapor / Wet Etch
- 13:18, 8 July 2022 diff hist +35 Equipment →Plasma Etch
- 13:16, 8 July 2022 diff hist -4 Equipment →Chemical vapor deposition (CVD)
- 13:15, 8 July 2022 diff hist -3 Equipment →Sputtering
- 13:15, 8 July 2022 diff hist -4 Equipment →Evaporation
- 11:56, 8 July 2022 diff hist +3 Equipment →Etch
- 11:54, 8 July 2022 diff hist +36 Equipment →Chemical vapor deposition (CVD)
- 11:44, 8 July 2022 diff hist -5 Equipment
- 11:43, 8 July 2022 diff hist +21 Equipment →Deposition
- 11:42, 8 July 2022 diff hist +5 Equipment →Deposition
- 11:40, 8 July 2022 diff hist +45 Lesker PVD75 DC/RF Sputterer →Resources
- 11:38, 8 July 2022 diff hist +27 Equipment →Evaporation
- 11:37, 8 July 2022 diff hist +18 Equipment →Sputtering
- 11:26, 8 July 2022 diff hist +546 Lesker PVD75 DC/RF Sputterer
- 09:58, 8 July 2022 diff hist +5 Lesker PVD75 DC/RF Sputterer →Description
- 09:24, 8 July 2022 diff hist +38 Quattrone Nanofabrication Facility →About the QNF
- 16:28, 30 June 2022 diff hist +291 Main Page