Difference between revisions of "PVD Equipment Overview"
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| + | [[Category:Physical Vapor Deposition]] | ||
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Latest revision as of 10:12, 25 July 2025
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- PVD-01: Lesker Nano-36 Thermal Evaporator
- PVD-02: Lesker PVD75 E-Beam/Thermal Evaporator
- PVD-03: Lesker PVD75 DC/RF Sputterer
- PVD-04: Lesker PVD75 E-beam Evaporator
- PVD-05: Denton Explorer14 Magnetron Sputterer
- PVD-09: Intlvac E-beam Evaporator
E-beam Crucible Liner Breakdown
- FABMATE Crucible: 99.9995% elemental carbon, internal volume: 4.4cc
- Intermetallic Crucible: BN-TiB2, internal volume: 4.4cc
