Intlvac E-beam Evaporator

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Intlvac E-Beam Evaporator
PVD-09.jpg
Tool Name Intlvac E-Beam Evaporator
Instrument Type Physical vapor deposition
Staff Manager David Barth
Lab Location Bay 2
Tool Manufacturer Intlvac
Tool Model Nanochrome
NEMO Designation PVD-09
Lab Phone 215-898-9748
SOP Link SOP

Description

The tool

The IntlVac Electron Beam Evaporator has a base process chamber pressure in the low e-8 Torr range with substrate heating and ozone purging capabilities. Deposition rates are monitored by an automated magazine of 6MHz crystals. The tool can be used to process a single 4 inch wafer at a time or a selection of small chips/pieces.

Available materials

The tool contains the following materials:

  • Al - Aluminum
  • Ti - Titanium

Resources

SOPs & Troubleshooting