PVD Equipment Overview

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• PVD-01: Lesker Nano-36 Thermal Evaporator
• PVD-02: Lesker PVD75 E-Beam/Thermal Evaporator
• PVD-03: Lesker PVD75 DC/RF Sputterer
• PVD-04: Lesker PVD75 E-beam Evaporator
• PVD-05: Denton Explorer14 Magnetron Sputterer
• PVD-09: Intlvac E-beam Evaporator

E-beam Crucible Liner Breakdown

• FABMATE Crucible: 99.9995% elemental carbon, internal volume: 4.4cc
• Intermetallic Crucible: BN-TiB₂, internal volume: 4.4cc