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(32 intermediate revisions by 4 users not shown) |
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| | imagecaption = | | | imagecaption = |
| | Instrument_Type = Deposition | | | Instrument_Type = Deposition |
− | | Staff_Manager = [[Jason_A._Röhr | Jason]] (jarohr@seas.upenn.edu) | + | | Staff_Manager = [[Sam Azadi | Sam Azadi]] |
| | Lab_Location = Bay 2 | | | Lab_Location = Bay 2 |
| | Tool_Manufacturer = Denton | | | Tool_Manufacturer = Denton |
| | Tool_Model = Explorer14 | | | Tool_Model = Explorer14 |
− | | Iris_Designation = PVD-05 | + | | NEMO_Designation = PVD-05 |
| | Lab_Phone = 215-898-9748 | | | Lab_Phone = 215-898-9748 |
| | SOP Link = [https://repository.upenn.edu/scn_sop/8 SOP] | | | SOP Link = [https://repository.upenn.edu/scn_sop/8 SOP] |
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| *This tool can sputter magnetic materials in source 2 and 4 | | *This tool can sputter magnetic materials in source 2 and 4 |
| *Load-lock tool; it takes approximately 7 min to load your sample | | *Load-lock tool; it takes approximately 7 min to load your sample |
− | *This is out recommended tool for co-deposition as the sources are always confocal mode | + | *This is our recommended tool for co-deposition as the sources are always confocal mode |
| | | |
− | == Available materials & process data == | + | '''For more information on PVD Equipment capabilities click [[PVD Equipment Overview|here]].''' |
| + | |
| + | == Process data & master recipes == |
| | | |
| All process data were recorded at a base pressure lower than 5 x 10-6 Torr; you can never exceed 200 W on RF and 600 W on DC. | | All process data were recorded at a base pressure lower than 5 x 10-6 Torr; you can never exceed 200 W on RF and 600 W on DC. |
| + | |
| + | Clicking on the material's name will take you to the master recipe. |
| | | |
| {| class="wikitable" | | {| class="wikitable" |
− | ! rowspan=2 | Material Name | + | ! rowspan=2 | Material name/link to master recipe |
| ! rowspan=2 | Max power | | ! rowspan=2 | Max power |
| ! colspan=3 | Process data | | ! colspan=3 | Process data |
| ! rowspan=2 | Recorded | | ! rowspan=2 | Recorded |
| + | ! rowspan=2 | Link to specs |
| |- | | |- |
| ! Pressure || Power || Rate | | ! Pressure || Power || Rate |
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| | [[Ag_master_recipe | Ag (silver)]] || 450 W || 3 mTorr || 140 W || 7.3 Å s<sup>-1</sup> || | | | [[Ag_master_recipe | Ag (silver)]] || 450 W || 3 mTorr || 140 W || 7.3 Å s<sup>-1</sup> || |
| |- | | |- |
− | | Al (aluminum) || 450 W || 3 mTorr || 200 W || 3.0 Å s<sup>-1</sup> || | + | | [[Al_master_recipe | Al (aluminum)]] || 450 W || 3 mTorr || 200 W || 3.0 Å s<sup>-1</sup> || |
| |- | | |- |
− | | Au (gold) || 140 W || 3 mTorr || 140 W || 4.6 Å s<sup>-1</sup> || | + | | [[Au (gold) | Au (gold)]] || 140 W || 3 mTorr || 140 W || 4.6 Å s<sup>-1</sup> || |
| |- | | |- |
− | | Cr (chromium) || 450 W || - || - || - || | + | | Cr (chromium) || 450 W || 3 mTorr || 450 W || 3.9 Å s<sup>-1</sup> || |
| |- | | |- |
− | | Cu (copper) || 450 W || 3 mTorr || 400 W || 3.4 Å s<sup>-1</sup> || | + | | [[Cu_master_recipe | Cu (copper)]] || 450 W || 3 mTorr || 400 W || 6.4 Å s<sup>-1</sup> || Aug 18, 2023 |
| |- | | |- |
| | Ge (germanium) || 140 W || - || - || - || | | | Ge (germanium) || 140 W || - || - || - || |
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| | Mn (manganese) || 140 W || - || - || - || | | | Mn (manganese) || 140 W || - || - || - || |
| |- | | |- |
− | | Mo (molybdenum) || 450 W || 3 mTorr || 140 || 1.9 Å s<sup>-1</sup> || | + | | [[Mo_master_recipe | Mo (molybdenum)]] || 450 W || 3 mTorr || 140 W || 1.9 Å s<sup>-1</sup> || |
− | |-
| |
− | | Ni (nickel) || 350 W || - || - || - ||
| |
| |- | | |- |
| | Pd (palladium) || 140 W || - || - || - || | | | Pd (palladium) || 140 W || - || - || - || |
| |- | | |- |
− | | Pt (platinum) || 140 W || 3 mTorr || 140 W || 2.6 Å s<sup>-1</sup> || | + | | [[Pt_master_recipe | Pt (platinum)]] || 140 W || 3 mTorr || 140 W || 2.6 Å s<sup>-1</sup> || |
| |- | | |- |
| | i-Si (intrinsic silicon) || 140 W || - || - || - || | | | i-Si (intrinsic silicon) || 140 W || - || - || - || |
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| | p-Si (p-type silicon) || 280 W || - || - || - || | | | p-Si (p-type silicon) || 280 W || - || - || - || |
| |- | | |- |
− | | Ti (titanium) || 350 W || 3 mTorr || 350 W || 2.0 Å s<sup>-1</sup> || | + | | [[Ti (titanium) | Ti (titanium)]] || 350 W || 3 mTorr || 350 W || 2.0 Å s<sup>-1</sup> || |
| |- | | |- |
| | TiO<sub>2</sub> (titanium dioxide) || 140 W || - || - || - || | | | TiO<sub>2</sub> (titanium dioxide) || 140 W || - || - || - || |
| |- | | |- |
− | | W (tungsten) || 450 W || - || - || - || | + | | [[W_master_recipe | W (tungsten)]] || 450 W || - || - || - || |
| |- | | |- |
| | YSZ (yttria-stabilized zirconia) || 140 W || - || - || - || | | | YSZ (yttria-stabilized zirconia) || 140 W || - || - || - || |
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| * [https://repository.upenn.edu/scn_sop/24/ SOP] | | * [https://repository.upenn.edu/scn_sop/24/ SOP] |
| * [https://upenn.box.com/s/xxo5dt2991cahd3wo71lq8cpzivpslid PVD-05 Target Lighting in Manual Mode] | | * [https://upenn.box.com/s/xxo5dt2991cahd3wo71lq8cpzivpslid PVD-05 Target Lighting in Manual Mode] |
| + | |
| + | <pdf height="800">File:PVD_05_SOP.pdf</pdf> |
| | | |
| ===== Target request form ===== | | ===== Target request form ===== |
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| | | |
| All recipes should not be run at base pressures higher than 5e-6 Torr. | | All recipes should not be run at base pressures higher than 5e-6 Torr. |
− |
| |
− | ===== Titanium (Ti) =====
| |
− |
| |
− | Step T004 is the deposition step and step T005 is the cool-down step (60 s).
| |
− |
| |
− | {| class="wikitable"
| |
− | ! Step Number || T000 || T001 || T002 || T003 || T004 || T005 || T006
| |
− | |-
| |
− | |-
| |
− | | Step Time (sec) || 5 || 120 || 60 || 60 || [dep] || 60 || 5
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Min Vacuum Setpoint (Torr) || || || || || || ||
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#DBFEFF"
| |
− | | Gas - (PID or Fixed) || || PID || PID || PID || PID || ||
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Gas - PID Master Gas Select || || 1 || 1 || 1 || 1 || ||
| |
− | |-
| |
− | | Gas1 - Setpoint (sccm) || || 10 || 10 || 10 || 10 || ||
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Gas2 - Setpoint (sccm) || || || || || || ||
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#DEB4DC"
| |
− | |Gas PID Pressure (mTorr) || || 10 || 5 || 3 || 3 || ||
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Sputter (Watts) || || || || || || ||
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Cathode Select || || || || || || ||
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Shutter || || || || || || ||
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Sputter (Watts) || || 100 || 200 || 300 || 350 || ||
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Cathode Select || || 2 || 2 || 2 || 2 || ||
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Shutter || || || || || Open || ||
| |
− | |-style="background-color:#FAD86F"
| |
− | | DC 2 Source - Sputter (Watts) || || || || || || ||
| |
− | |-style="background-color:#FAD86F"
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#FAD86F"
| |
− | | DC 2 Source - Shutter || || || || || || ||
| |
− | |-style="background-color:#6FD2FA"
| |
− | | Pressure Control (Throttle) || Yes || Yes || Yes || Yes || Yes || ||
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Ignition Pressure (mTorr) || || || || || || ||
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#E8F213"
| |
− | | Rotation Speed (0-100%) || 50 || 50 || 50 || 50 || 50 || ||
| |
− | |-
| |
− | | End Process (Yes) || || || || || || || Yes
| |
− | |}
| |
− |
| |
− | ===== Aluminum (Al) =====
| |
− |
| |
− | Step T004 is the deposition step and step T005 is the cool-down step (300 s).
| |
− |
| |
− | {| class="wikitable"
| |
− | ! Step Number || T000 || T001 || T002 || T003 || T004 || T005 || T006
| |
− | |-
| |
− | |-
| |
− | | Step Time (sec) || 5 || 120 || 60 || 60 || [dep] || 300 || 5
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Min Vacuum Setpoint (Torr) || || || || || || ||
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#DBFEFF"
| |
− | | Gas - (PID or Fixed) || || PID || PID || PID || PID || ||
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Gas - PID Master Gas Select || || 1 || 1 || 1 || 1 || ||
| |
− | |-
| |
− | | Gas1 - Setpoint (sccm) || || 10 || 10 || 10 || 10 || ||
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Gas2 - Setpoint (sccm) || || || || || || ||
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#DEB4DC"
| |
− | |Gas PID Pressure (mTorr) || || 10 || 5 || 3 || 3 || ||
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Sputter (Watts) || || || || || || ||
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Cathode Select || || || || || || ||
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Shutter || || || || || || ||
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Sputter (Watts) || || || || || || ||
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Cathode Select || || || || || || ||
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Shutter || || || || || || ||
| |
− | |-style="background-color:#FAD86F"
| |
− | | DC 2 Source - Sputter (Watts) || || 100 || 150 || 200 || 200 || ||
| |
− | |-style="background-color:#FAD86F"
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#FAD86F"
| |
− | | DC 2 Source - Shutter || || || || || Open || ||
| |
− | |-style="background-color:#6FD2FA"
| |
− | | Pressure Control (Throttle) || || Yes || Yes || Yes || Yes || ||
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Ignition Pressure (mTorr) || || || || || || ||
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#E8F213"
| |
− | | Rotation Speed (0-100%) || || 50 || 50 || 50 || 50 || 50 ||
| |
− | |-
| |
− | | End Process (Yes) || || || || || || || Yes
| |
− | |}
| |
− |
| |
− | ===== Copper (Cu) =====
| |
− |
| |
− | Step T004 is the deposition step and step T005 is the cool-down step (300 s).
| |
− |
| |
− | {| class="wikitable"
| |
− | ! Step Number || T000 || T001 || T002 || T003 || T004 || T005 || T006
| |
− | |-
| |
− | |-
| |
− | | Step Time (sec) || 5 || 120 || 60 || 60 || [dep] || 300 || 5
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Min Vacuum Setpoint (Torr) || || || || || || ||
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#DBFEFF"
| |
− | | Gas - (PID or Fixed) || || PID || PID || PID || PID || ||
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Gas - PID Master Gas Select || || 1 || 1 || 1 || 1 || ||
| |
− | |-
| |
− | | Gas1 - Setpoint (sccm) || || 10 || 10 || 10 || 10 || ||
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Gas2 - Setpoint (sccm) || || || || || || ||
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#DEB4DC"
| |
− | |Gas PID Pressure (mTorr) || || 10 || 5 || 3 || 3 || ||
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Sputter (Watts) || || || || || || ||
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Cathode Select || || || || || || ||
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Shutter || || || || || || ||
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Sputter (Watts) || || || || || || ||
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Cathode Select || || || || || || ||
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Shutter || || || || || || ||
| |
− | |-style="background-color:#FAD86F"
| |
− | | DC 2 Source - Sputter (Watts) || || 100 || 200 || 300 || 400 || ||
| |
− | |-style="background-color:#FAD86F"
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#FAD86F"
| |
− | | DC 2 Source - Shutter || || || || || Open || ||
| |
− | |-style="background-color:#6FD2FA"
| |
− | | Pressure Control (Throttle) || || Yes || Yes || Yes || Yes || ||
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Ignition Pressure (mTorr) || || || || || || ||
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#E8F213"
| |
− | | Rotation Speed (0-100%) || || 50 || 50 || 50 || 50 || 50 ||
| |
− | |-
| |
− | | End Process (Yes) || || || || || || || Yes
| |
− | |}
| |
− |
| |
− | ===== Silver (Ag) =====
| |
− |
| |
− | Note the extra long cool-down time. Reducing this time can affect the target.
| |
− |
| |
− | {| class="wikitable"
| |
− | ! Step Number || T000 || T001 || T002 || T003 || T004 || T005 || T006
| |
− | |-
| |
− | |-
| |
− | | Step Time (sec) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Min Vacuum Setpoint (Torr) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#DBFEFF"
| |
− | | Gas - (PID or Fixed) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Gas - PID Master Gas Select || - || - || - || - || - || - || -
| |
− | |-
| |
− | | Gas1 - Setpoint (sccm) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Gas2 - Setpoint (sccm) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#DEB4DC"
| |
− | |Gas PID Pressure (mTorr) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Sputter (Watts) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Cathode Select || - || - || - || - || - || - || -
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Shutter || - || - || - || - || - || - || -
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Sputter (Watts) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Cathode Select || - || - || - || - || - || - || -
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Shutter || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FAD86F"
| |
− | | DC 2 Source - Sputter (Watts) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FAD86F"
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#FAD86F"
| |
− | | DC 2 Source - Shutter || - || - || - || - || - || - || -
| |
− | |-style="background-color:#6FD2FA"
| |
− | | Pressure Control (Throttle) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Ignition Pressure (mTorr) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#E8F213"
| |
− | | Rotation Speed (0-100%) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | End Process (Yes) || - || - || - || - || - || - || -
| |
− | |}
| |
− |
| |
− | ===== Gold (Au) =====
| |
− |
| |
− | {| class="wikitable"
| |
− | ! Step Number || T000 || T001 || T002 || T003 || T004 || T005 || T006
| |
− | |-
| |
− | |-
| |
− | | Step Time (sec) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Min Vacuum Setpoint (Torr) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#DBFEFF"
| |
− | | Gas - (PID or Fixed) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Gas - PID Master Gas Select || - || - || - || - || - || - || -
| |
− | |-
| |
− | | Gas1 - Setpoint (sccm) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Gas2 - Setpoint (sccm) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#DEB4DC"
| |
− | |Gas PID Pressure (mTorr) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Sputter (Watts) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Cathode Select || - || - || - || - || - || - || -
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Shutter || - || - || - || - || - || - || -
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Sputter (Watts) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Cathode Select || - || - || - || - || - || - || -
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Shutter || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FAD86F"
| |
− | | DC 2 Source - Sputter (Watts) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FAD86F"
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#FAD86F"
| |
− | | DC 2 Source - Shutter || - || - || - || - || - || - || -
| |
− | |-style="background-color:#6FD2FA"
| |
− | | Pressure Control (Throttle) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Ignition Pressure (mTorr) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#E8F213"
| |
− | | Rotation Speed (0-100%) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | End Process (Yes) || - || - || - || - || - || - || -
| |
− | |}
| |
− |
| |
− | ===== Platinum (Pt) =====
| |
− |
| |
− | {| class="wikitable"
| |
− | ! Step Number || T000 || T001 || T002 || T003 || T004 || T005 || T006
| |
− | |-
| |
− | |-
| |
− | | Step Time (sec) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Min Vacuum Setpoint (Torr) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#DBFEFF"
| |
− | | Gas - (PID or Fixed) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Gas - PID Master Gas Select || - || - || - || - || - || - || -
| |
− | |-
| |
− | | Gas1 - Setpoint (sccm) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Gas2 - Setpoint (sccm) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#DEB4DC"
| |
− | |Gas PID Pressure (mTorr) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Sputter (Watts) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Cathode Select || - || - || - || - || - || - || -
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Shutter || - || - || - || - || - || - || -
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Sputter (Watts) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Cathode Select || - || - || - || - || - || - || -
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Shutter || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FAD86F"
| |
− | | DC 2 Source - Sputter (Watts) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FAD86F"
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#FAD86F"
| |
− | | DC 2 Source - Shutter || - || - || - || - || - || - || -
| |
− | |-style="background-color:#6FD2FA"
| |
− | | Pressure Control (Throttle) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Ignition Pressure (mTorr) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#E8F213"
| |
− | | Rotation Speed (0-100%) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | End Process (Yes) || - || - || - || - || - || - || -
| |
− | |}
| |
− |
| |
− | ===== Tungsten (W) =====
| |
− |
| |
− | {| class="wikitable"
| |
− | ! Step Number || T000 || T001 || T002 || T003 || T004 || T005 || T006
| |
− | |-
| |
− | |-
| |
− | | Step Time (sec) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Min Vacuum Setpoint (Torr) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#DBFEFF"
| |
− | | Gas - (PID or Fixed) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Gas - PID Master Gas Select || - || - || - || - || - || - || -
| |
− | |-
| |
− | | Gas1 - Setpoint (sccm) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Gas2 - Setpoint (sccm) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#DEB4DC"
| |
− | |Gas PID Pressure (mTorr) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Sputter (Watts) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Cathode Select || - || - || - || - || - || - || -
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Shutter || - || - || - || - || - || - || -
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Sputter (Watts) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Cathode Select || - || - || - || - || - || - || -
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Shutter || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FAD86F"
| |
− | | DC 2 Source - Sputter (Watts) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FAD86F"
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#FAD86F"
| |
− | | DC 2 Source - Shutter || - || - || - || - || - || - || -
| |
− | |-style="background-color:#6FD2FA"
| |
− | | Pressure Control (Throttle) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Ignition Pressure (mTorr) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#E8F213"
| |
− | | Rotation Speed (0-100%) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | End Process (Yes) || - || - || - || - || - || - || -
| |
− | |}
| |
− |
| |
− | ===== Molybdenum (Mo) =====
| |
− |
| |
− | {| class="wikitable"
| |
− | ! Step Number || T000 || T001 || T002 || T003 || T004 || T005 || T006
| |
− | |-
| |
− | |-
| |
− | | Step Time (sec) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Min Vacuum Setpoint (Torr) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#DBFEFF"
| |
− | | Gas - (PID or Fixed) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Gas - PID Master Gas Select || - || - || - || - || - || - || -
| |
− | |-
| |
− | | Gas1 - Setpoint (sccm) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Gas2 - Setpoint (sccm) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#DEB4DC"
| |
− | |Gas PID Pressure (mTorr) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Sputter (Watts) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Cathode Select || - || - || - || - || - || - || -
| |
− | |-style="background-color:#DCF5E9"
| |
− | | RF Source - Shutter || - || - || - || - || - || - || -
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Sputter (Watts) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Cathode Select || - || - || - || - || - || - || -
| |
− | |-style="background-color:#ECFA6F"
| |
− | | DC 1 Source - Shutter || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FAD86F"
| |
− | | DC 2 Source - Sputter (Watts) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FAD86F"
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#FAD86F"
| |
− | | DC 2 Source - Shutter || - || - || - || - || - || - || -
| |
− | |-style="background-color:#6FD2FA"
| |
− | | Pressure Control (Throttle) || - || - || - || - || - || - || -
| |
− | |-style="background-color:#FFFFFF"
| |
− | | Ignition Pressure (mTorr) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | || || || || || || ||
| |
− | |-style="background-color:#E8F213"
| |
− | | Rotation Speed (0-100%) || - || - || - || - || - || - || -
| |
− | |-
| |
− | | End Process (Yes) || - || - || - || - || - || - || -
| |
− | |}
| |