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Show new changes starting from 18:32, 28 September 2024

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(±123): The page size changed by this number of bytes

26 September 2024

15:43

Join‎ diffhist +36‎ Ericdj talk contribs

25 September 2024

			N 10:00		PVD Equipment Overview‎‎ 6 changes history +738‎ [Dsabr‎ (6×)]
					10:00 (cur \| prev) +552‎ Dsabr talk contribs
					09:53 (cur \| prev) 0‎ Dsabr talk contribs
					09:52 (cur \| prev) +1‎ Dsabr talk contribs
					09:52 (cur \| prev) +13‎ Dsabr talk contribs
					09:52 (cur \| prev) +1‎ Dsabr talk contribs
			N		09:51 (cur \| prev) +171‎ Dsabr talk contribs Created page with "<iframe height="400px" key="google" level="docs" path="/spreadsheets/d/e/2PACX-1vQfBd9HDc9tQs2cicaML1PcdREwzxlqGEYzdxl-AEvYWkopQLSQ9osJxEp5VAcTz6zqH92BYy4ftGGU/pubhtml" />"

09:56

Denton Explorer14 Magnetron Sputterer‎ diffhist +97‎ Dsabr talk contribs →‎Description

			09:55		Lesker PVD75 DC/RF Sputterer‎‎ 2 changes history +97‎ [Dsabr‎ (2×)]
					09:55 (cur \| prev) +6‎ Dsabr talk contribs →‎Tool description
					09:55 (cur \| prev) +91‎ Dsabr talk contribs →‎Tool description

			09:54		Equipment‎‎ 2 changes history +54‎ [Dsabr‎ (2×)]
					09:54 (cur \| prev) +27‎ Dsabr talk contribs →‎Deposition
					09:47 (cur \| prev) +27‎ Dsabr talk contribs →‎Deposition

24 September 2024

11:49

SiO2 (silicon dioxide)‎ diffhist 0‎ Dsabr talk contribs →‎Sputter Deposition Rates

23 September 2024

13:53

Ti (titanium)‎ diffhist +8‎ Dsabr talk contribs →‎Sputter Deposition Rates

20 September 2024

16:46

Intlvac E-beam Evaporator‎ diffhist +35‎ Dsabr talk contribs

18 September 2024

10:04

Lesker PVD75 DC/RF Sputterer‎ diffhist +36‎ Dsabr talk contribs →‎SOPs & troubleshooting

17 September 2024

16:31

Micromanipulator 4060 Probe Station‎ diffhist +28‎ Dsabr talk contribs →‎SOPs & Troubleshooting

			15:39		Intlvac E-beam Evaporator‎‎ 2 changes history +35‎ [Dsabr‎ (2×)]
					15:39 (cur \| prev) -52‎ Dsabr talk contribs →‎SOPs & Troubleshooting
					15:39 (cur \| prev) +87‎ Dsabr talk contribs

16 September 2024

16:45

Heidelberg DWL 66+ Laser Writer‎ diffhist +72‎ Coana talk contribs →‎Processes

			15:48		Oxford 80 Plus RIE‎‎ 6 changes history -696‎ [Azadi‎ (6×)]
					15:48 (cur \| prev) +3‎ Azadi talk contribs →‎Description
					15:20 (cur \| prev) 0‎ Azadi talk contribs
					14:48 (cur \| prev) 0‎ Azadi talk contribs →‎Standard Process Information
					14:48 (cur \| prev) +24‎ Azadi talk contribs →‎Standard Process Information
					13:13 (cur \| prev) 0‎ Azadi talk contribs →‎Etch Rate
					13:12 (cur \| prev) -723‎ Azadi talk contribs →‎Standard Process Information

			N 15:47		PECVD SiNx via CHF3 + O2‎‎ 14 changes history +1,814‎ [Azadi‎ (14×)]
					15:47 (cur \| prev) -8‎ Azadi talk contribs →‎Protocol
					15:47 (cur \| prev) +22‎ Azadi talk contribs →‎Materials
					15:44 (cur \| prev) +19‎ Azadi talk contribs →‎Materials
					15:41 (cur \| prev) 0‎ Azadi talk contribs
					15:40 (cur \| prev) -3‎ Azadi talk contribs →‎Expose
					15:36 (cur \| prev) +76‎ Azadi talk contribs
					15:30 (cur \| prev) +6‎ Azadi talk contribs
					15:30 (cur \| prev) +43‎ Azadi talk contribs
					15:27 (cur \| prev) -100‎ Azadi talk contribs →‎Equipment
					15:24 (cur \| prev) -6‎ Azadi talk contribs →‎Goal
					15:23 (cur \| prev) +76‎ Azadi talk contribs
					14:59 (cur \| prev) +170‎ Azadi talk contribs
					14:53 (cur \| prev) +1,459‎ Azadi talk contribs
			N		14:48 (cur \| prev) +60‎ Azadi talk contribs Created page with "== Results == center\|800px"

			14:59		PECVD SiO2 via CHF3 + O2‎‎ 2 changes history -10‎ [Azadi‎ (2×)]
					14:59 (cur \| prev) -15‎ Azadi talk contribs
					14:49 (cur \| prev) +5‎ Azadi talk contribs

			14:56		(Upload log)‎ [Azadi‎ (3×)]
					14:56 Azadi talk contribs uploaded File:SiO2 etch via DE04 CHF3 O2.png ‎
					14:44 Azadi talk contribs uploaded a new version of File:SiN etch on DE-04.png ‎
					14:38 Azadi talk contribs uploaded File:SiN etch on DE-04.png ‎(SiN etch on DE04 CHF3O2)

			N 14:47		PECVD SiNx via CF4‎‎ 3 changes history 0‎ [Azadi‎ (3×)]
					14:47 (cur \| prev) -60‎ Azadi talk contribs Blanked the page Tag: Blanking
					14:47 (cur \| prev) 0‎ Azadi talk contribs →‎Results
			N		14:46 (cur \| prev) +60‎ Azadi talk contribs Created page with "== Results == center\|800px"

11 September 2024

			11:32		Intlvac E-beam Evaporator‎‎ 2 changes history +70‎ [Dsabr‎ (2×)]
					11:32 (cur \| prev) +4‎ Dsabr talk contribs
					11:24 (cur \| prev) +66‎ Dsabr talk contribs →‎SOPs & Troubleshooting

			N 10:00		PVD Equipment Overview‎‎ 6 changes history +738‎ [Dsabr‎ (6×)]
					10:00 (cur \| prev) +552‎ Dsabr talk contribs
					09:53 (cur \| prev) 0‎ Dsabr talk contribs
					09:52 (cur \| prev) +1‎ Dsabr talk contribs
					09:52 (cur \| prev) +13‎ Dsabr talk contribs
					09:52 (cur \| prev) +1‎ Dsabr talk contribs
			N		09:51 (cur \| prev) +171‎ Dsabr talk contribs Created page with "<iframe height="400px" key="google" level="docs" path="/spreadsheets/d/e/2PACX-1vQfBd9HDc9tQs2cicaML1PcdREwzxlqGEYzdxl-AEvYWkopQLSQ9osJxEp5VAcTz6zqH92BYy4ftGGU/pubhtml" />"

			15:48		Oxford 80 Plus RIE‎‎ 6 changes history -696‎ [Azadi‎ (6×)]
					15:48 (cur \| prev) +3‎ Azadi talk contribs →‎Description
					15:20 (cur \| prev) 0‎ Azadi talk contribs
					14:48 (cur \| prev) 0‎ Azadi talk contribs →‎Standard Process Information
					14:48 (cur \| prev) +24‎ Azadi talk contribs →‎Standard Process Information
					13:13 (cur \| prev) 0‎ Azadi talk contribs →‎Etch Rate
					13:12 (cur \| prev) -723‎ Azadi talk contribs →‎Standard Process Information

			N 15:47		PECVD SiNx via CHF3 + O2‎‎ 14 changes history +1,814‎ [Azadi‎ (14×)]
					15:47 (cur \| prev) -8‎ Azadi talk contribs →‎Protocol
					15:47 (cur \| prev) +22‎ Azadi talk contribs →‎Materials
					15:44 (cur \| prev) +19‎ Azadi talk contribs →‎Materials
					15:41 (cur \| prev) 0‎ Azadi talk contribs
					15:40 (cur \| prev) -3‎ Azadi talk contribs →‎Expose
					15:36 (cur \| prev) +76‎ Azadi talk contribs
					15:30 (cur \| prev) +6‎ Azadi talk contribs
					15:30 (cur \| prev) +43‎ Azadi talk contribs
					15:27 (cur \| prev) -100‎ Azadi talk contribs →‎Equipment
					15:24 (cur \| prev) -6‎ Azadi talk contribs →‎Goal
					15:23 (cur \| prev) +76‎ Azadi talk contribs
					14:59 (cur \| prev) +170‎ Azadi talk contribs
					14:53 (cur \| prev) +1,459‎ Azadi talk contribs
			N		14:48 (cur \| prev) +60‎ Azadi talk contribs Created page with "== Results == center\|800px"

			N 14:47		PECVD SiNx via CF4‎‎ 3 changes history 0‎ [Azadi‎ (3×)]
					14:47 (cur \| prev) -60‎ Azadi talk contribs Blanked the page Tag: Blanking
					14:47 (cur \| prev) 0‎ Azadi talk contribs →‎Results
			N		14:46 (cur \| prev) +60‎ Azadi talk contribs Created page with "== Results == center\|800px"