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Combined display of all available logs of Quattrone Nanofabrication Facility. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 50 | older 50) (20 | 50 | 100 | 250 | 500)- 15:43, 30 August 2024 Dsabr talk contribs uploaded File:PVD-09.jpg
- 10:52, 30 August 2024 Dsabr talk contribs created page Intlvac E-beam Evaporator (Created page with "Category:Deposition {{EquipmentInfo | name = Lesker PVD75 E-Beam/Thermal Evaporator | Tool_Name = Lesker PVD75 E-Beam/Thermal Evaporator | image = Image:PVD-04.jpeg|300...")
- 17:10, 5 August 2024 User account Kritank talk contribs was created automatically
- 17:26, 2 August 2024 User account Qixzhang talk contribs was created automatically
- 14:33, 30 July 2024 Azadi talk contribs created page File:RIE CF4 etch rate 2min SiN LPCVD 07292024.png (LPCVD SiNx with CF4 in RIE)
- 14:33, 30 July 2024 Azadi talk contribs uploaded File:RIE CF4 etch rate 2min SiN LPCVD 07292024.png (LPCVD SiNx with CF4 in RIE)
- 09:59, 14 July 2024 User account Kalshaw talk contribs was created automatically
- 14:56, 26 June 2024 User account Flynch talk contribs was created automatically
- 14:56, 21 June 2024 Ericdj talk contribs created page Frequently Asked Questions (Created page with "Frequently Asked Questions How do I get access to use QNF? Please see this webpage for access to QNF: https://wiki.nano.upenn.edu/wiki/index.php?title=Join You may not need...")
- 17:50, 18 June 2024 Coana talk contribs deleted page Apogee Spinner - Positive Resist (Right) (Author request: consolidating Apogee spinner pages)
- 17:48, 18 June 2024 Coana talk contribs created page CEE Apogee Spinner (Created page with "Category:Lithography {{EquipmentInfo | name = CEE Apogee Spinner | Tool_Name = CEE Apogee Spinner | image = | imagecaption = | Instrument_Type = Lithography | Staff_Man...")
- 17:47, 18 June 2024 Coana talk contribs deleted page Apogee Spinner (name change)
- 17:46, 18 June 2024 Coana talk contribs created page Apogee Spinner (Created page with "Category:Lithography {{EquipmentInfo | name = Apogee Spinner | Tool_Name = Apogee Spinner | image = | imagecaption = | Instrument_Type = Lithography | Staff_Manager = [...")
- 17:41, 18 June 2024 Coana talk contribs deleted page Apogee Spinner - E-Beam Resist (Author request: consolidating Apogee spinner pages)
- 17:37, 18 June 2024 Coana talk contribs deleted page Apogee Spinner - Positive Resist (Left) (Author request: consolidating Apogee spinner pages)
- 09:45, 18 June 2024 Azadi talk contribs created page File:DE04 PECVD SiO2 rate etch via CHF3O2.png (DE04 etch rate for PECVD SiO2 using CHF3 and O2)
- 09:45, 18 June 2024 Azadi talk contribs uploaded File:DE04 PECVD SiO2 rate etch via CHF3O2.png (DE04 etch rate for PECVD SiO2 using CHF3 and O2)
- 09:30, 18 June 2024 Azadi talk contribs created page PECVD SiO2 via CHF3 + O2 (Created page with "== Goal == The purpose of this document is to examine the etch properties of the Oxford 80 Plus RIE system and to find the etch rate of SiO2 and S1818 MicroChem positive resi...")
- 09:05, 18 June 2024 Azadi talk contribs created page PECVD SiO2 via CF4 (Created page with "== Goal == The purpose of this document is to examine the etch properties of the Oxford 80 Plus RIE system and to find the etch rate of SiO2 and S1818 MicroChem positive resi...")
- 16:02, 17 June 2024 Coana talk contribs deleted page PECVD SiO2 via CF4 (Author request: content was: " PECVD SiO<sub>2</sub> via CF<sub>4</sub>", and the only contributor was "Coana" (talk))
- 15:58, 17 June 2024 Coana talk contribs created page PECVD SiO2 via CF4 (Created page with " PECVD SiO<sub>2</sub> via CF<sub>4</sub>")
- 15:47, 17 June 2024 Coana talk contribs created page How to Make a Mask (Created page with "https://nemo.nano.upenn.edu/media/tool_documents/lw-01-heidelberg-dwl66/How_to_Make_a_Mask_At_QNF_v05.pdf")
- 16:41, 7 June 2024 Lucasamb talk contribs moved page ALD-02: Titanium Oxide Deposition to ALD-02: Titanium Dioxide Deposition
- 10:59, 7 June 2024 Lucasamb talk contribs created page ALD-02: Titanium Oxide Deposition (Created blank page)
- 10:56, 7 June 2024 Lucasamb talk contribs created page ALD-01: Titanium Oxide Deposition (Created page with "<iframe height="300px" width=2000px" key="google" level="docs" path=https:https://docs.google.com/spreadsheets/d/e/2PACX-1vRT0Xcfp3506lnri7h04_tPNBdXSckz1XCJizwMky8hWDH0QwxxVH...")
- 11:06, 6 June 2024 User account Yijied talk contribs was created automatically
- 16:28, 5 June 2024 User account Yubwang talk contribs was created automatically
- 14:51, 3 June 2024 Lucasamb talk contribs created page ALD-01: Hafnium Oxide Deposition (Created page with "<iframe height="500px" width="1000px"key="google" level="docs" path=https://docs.google.com/spreadsheets/d/e/2PACX-1vS0-QBsrmBWXosfTpJrMo44JuxVGfhODnOQRWZVMIgrOLrkO_LO5Hgd6DvL...")
- 11:00, 22 May 2024 Azadi talk contribs created page File:DE06 SOP v03.pdf
- 11:00, 22 May 2024 Azadi talk contribs uploaded File:DE06 SOP v03.pdf
- 14:42, 20 May 2024 Dsabr talk contribs created page File:Oxford PECVD SiO2 deposition.pdf
- 14:42, 20 May 2024 Dsabr talk contribs uploaded File:Oxford PECVD SiO2 deposition.pdf
- 14:26, 20 May 2024 Lucasamb talk contribs created page ALD-01: Aluminum Oxide Deposition (Created page with "<iframe height="500px" key="google" level="docs" path="https://docs.google.com/spreadsheets/d/e/2PACX-1vRT0Xcfp3506lnri7h04_tPNBdXSckz1XCJizwMky8hWDH0QwxxVHefXI4scbtD66peP2nHN...")
- 12:43, 20 May 2024 Bohnn talk contribs created page ToF-SIMS (Created page with "==Overview== '''Time of Flight Secondary Ion Mass Spectroscopy''' or '''ToF-SIMS''' is an technique performed in a FIB to analyze the composi...")
- 12:00, 20 May 2024 Dsabr talk contribs created page SiO2 (silicon dioxide) (Created page with "Silicon dioxide is an insulating, transparent oxide that is highly unreactive. It is often used as a passivation layer to protect electrical components. ==Equipment== ===...")
- 10:50, 16 May 2024 Dsabr talk contribs created page File:PVD 05 SOP.pdf
- 10:50, 16 May 2024 Dsabr talk contribs uploaded File:PVD 05 SOP.pdf
- 10:45, 16 May 2024 Dsabr talk contribs created page File:PVD 04 SOP.pdf
- 10:45, 16 May 2024 Dsabr talk contribs uploaded File:PVD 04 SOP.pdf
- 14:24, 15 May 2024 Dsbarth talk contribs created page ZEP Process Data (Created page with "<iframe height="400px" key="google" level="docs" path="/spreadsheets/u/0/d/e/2PACX-1vSvZG1_8z70Dl9liA3fY2p8jojsyW4ELRhjOzFc7UKzOlXOxWQ4XkD6m_RAMx8-u2E5G21yPdKG6loM/pubchart?oi...")
- 14:16, 15 May 2024 Dsbarth talk contribs changed group membership for Lucasamb from Editor to Editor and administrator
- 14:16, 15 May 2024 Dsbarth talk contribs changed group membership for Coana from Editor to Editor and administrator
- 14:16, 15 May 2024 Dsbarth talk contribs changed group membership for Dsabr from Editor to Editor and administrator
- 14:15, 15 May 2024 Dsbarth talk contribs changed group membership for Azadi from Editor to Editor and administrator
- 11:34, 13 May 2024 User account Lixlei talk contribs was created automatically
- 13:40, 10 May 2024 Bohnn talk contribs created page Keyence Profilometer (Created page with "Category:Characterization {{EquipmentInfo | name = Keyence Profilometer | Tool_Name = Keyence | image = 300px | imagecaption = | Instrument_Type = P...")
- 13:37, 10 May 2024 Bohnn talk contribs created page File:Keyence.jpg (image of keyence profilometer)
- 13:37, 10 May 2024 Bohnn talk contribs uploaded File:Keyence.jpg (image of keyence profilometer)
- 13:37, 10 May 2024 Bohnn talk contribs created page File:20240510 133218.jpg (image of keyence profilometer)
- 13:37, 10 May 2024 Bohnn talk contribs uploaded File:20240510 133218.jpg (image of keyence profilometer)
