CEE Apogee Spinner
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| Tool Name | CEE Apogee Spinner |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Ana Cohen |
| Lab Location | Bays 4, 5 & 6 |
| Tool Manufacturer | CEE |
| Tool Model | Apogee |
| NEMO Designation | SPN-01, -03, -06, -08, -09 |
| Nearest Phone | |
| SOP Link | SOP |
Description
CEE Apogee spincoaters are located in Bays 4, 5 and 6. Control of ramp rate and speed. Includes wafer centering step.
Allowed Materials
SPN-01: Acetone compatible/soluble resists only – S18xx, SPR 220-x, AZ series, KL series, K-Pro. No LOR, PMGI or Polyimide!
SPN-03: LOR, PMGI, Polyimide
SPN-06: E-beam resist only – PMMA A series, 1000 HARP series, ZEP520, HSQ. No LOR, PMGI or Polyimide!
SPN-08: Negative epoxy resists only - SU8, HARE SQ
SPN-09: PDMS
Resources
SOPs
- SOP for all QNF Apogee Spinners
- Video - Manual Dispense
- Video - Centering Device
- Video - Chuck Installation
- Video - Chuck Assembly
About Spin-coating
Troubleshooting
Process Issues
Vacuum Issues
Vacuum should be met when the correct chuck size is chosen and chuck/base seal correctly.
- Is your chuck size is correct for your substrate?;
- Is the chuck base properly screwed on, if the base is needed?
- Carefully screw on the base, don't cross the threads! Also make sure to screw as tightly as the chuck allows, but not further. These parts are plastic and can easily deteriorate if abused.
- Are all necessary o-rings installed?
- This includes the o-ring for the chuck base. This sometimes gets stuck and accidentally removed when someone has changed the chuck size.
- Is there residue on the chuck?
- Wipe down the chuck with IPA. If the residue is significant, report as a tool problem on NEMO.
- Is the chuck was installed on the spindle correctly?
- Is your sample flat/ without holes?
- Try using a bare silicon wafer. If this works, the issue is likely your sample. To spin-coat on problematic samples, contact QNF staff.