ToF-SIMS

Overview

Time of Flight Secondary Ion Mass Spectroscopy or ToF-SIMS is an technique performed in a FIB to analyze the composition of surface layers. During analysis, a primary ion beam is rastered across the surface of a specimen to sputter atoms, molecules, and ions from the surface. Sputtered ions are attracted to and collected by a detector as they leave the specimen, which can identify ions or other charged particles according to charge and mass.

Equipment

Focused Ion Beam Microscopes

• TESCAN S8000X FIB/SEM (EDAX)