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Combined display of all available logs of Quattrone Nanofabrication Facility. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 50 | older 50) (20 | 50 | 100 | 250 | 500)- 13:30, 30 October 2024 User account Jiuhe talk contribs was created automatically
- 13:02, 25 October 2024 User account Cyc913 talk contribs was created automatically
- 12:12, 25 October 2024 User account Seyeonsp talk contribs was created automatically
- 13:25, 15 October 2024 User account Liuac talk contribs was created automatically
- 13:50, 14 October 2024 Lucasamb talk contribs created page Amorphous silicon deposition (Created page with "== Goal == The purpose of this document is to examine the etch properties of the Oxford 80 Plus RIE system and to find the etch rate of SiO2 and S1818 MicroChem positive resi...")
- 14:52, 1 October 2024 Dsabr talk contribs created page File:Fabmate 4-4cc.png
- 14:52, 1 October 2024 Dsabr talk contribs uploaded File:Fabmate 4-4cc.png
- 13:27, 30 September 2024 Azadi talk contribs created page IntlVac NanoQuest 1 IBE (Created page with "Category:Etch {{EquipmentInfo | name = IntlVac Nanoquest 1 | Tool_Name = IntlVac IBE | image = 300px | imagecaption = | Instrument_Type = Etch | St...")
- 08:51, 25 September 2024 Dsabr talk contribs created page PVD Equipment Overview (Created page with "<iframe height="400px" key="google" level="docs" path="/spreadsheets/d/e/2PACX-1vQfBd9HDc9tQs2cicaML1PcdREwzxlqGEYzdxl-AEvYWkopQLSQ9osJxEp5VAcTz6zqH92BYy4ftGGU/pubhtml" />")
- 10:14, 24 September 2024 User account Jxwu94 talk contribs was created automatically
- 13:56, 16 September 2024 Azadi talk contribs created page File:SiO2 etch via DE04 CHF3 O2.png
- 13:56, 16 September 2024 Azadi talk contribs uploaded File:SiO2 etch via DE04 CHF3 O2.png
- 13:48, 16 September 2024 Azadi talk contribs created page PECVD SiNx via CHF3 + O2 (Created page with "== Results == center|800px")
- 13:46, 16 September 2024 Azadi talk contribs created page PECVD SiNx via CF4 (Created page with "== Results == center|800px")
- 13:44, 16 September 2024 Azadi talk contribs uploaded a new version of File:SiN etch on DE-04.png
- 13:38, 16 September 2024 Azadi talk contribs created page File:SiN etch on DE-04.png (SiN etch on DE04 CHF3O2)
- 13:38, 16 September 2024 Azadi talk contribs uploaded File:SiN etch on DE-04.png (SiN etch on DE04 CHF3O2)
- 07:24, 13 September 2024 User account Edesarro talk contribs was created automatically
- 13:42, 9 September 2024 Lucasamb talk contribs created page File:RTA01 SOP 20240909.pdf (RTA-01 SOP: updated on September 09, 2024.)
- 13:42, 9 September 2024 Lucasamb talk contribs uploaded File:RTA01 SOP 20240909.pdf (RTA-01 SOP: updated on September 09, 2024.)
- 13:16, 9 September 2024 Lucasamb talk contribs created page File:RTA01.jpg (Rapid Thermal Annealer - 01)
- 13:16, 9 September 2024 Lucasamb talk contribs uploaded File:RTA01.jpg (Rapid Thermal Annealer - 01)
- 12:16, 9 September 2024 Lucasamb talk contribs created page RTA-01 (Created page with "== Description == The Rapid Thermal Annealer-01 anneals the sample up to 1200° C. The processes can be run under atmospheric pressure in Oxygen, Nitrogen, Forming Gas, and A...")
- 14:43, 30 August 2024 Dsabr talk contribs created page File:PVD-09.jpg
- 14:43, 30 August 2024 Dsabr talk contribs uploaded File:PVD-09.jpg
- 09:52, 30 August 2024 Dsabr talk contribs created page Intlvac E-beam Evaporator (Created page with "Category:Deposition {{EquipmentInfo | name = Lesker PVD75 E-Beam/Thermal Evaporator | Tool_Name = Lesker PVD75 E-Beam/Thermal Evaporator | image = Image:PVD-04.jpeg|300...")
- 16:10, 5 August 2024 User account Kritank talk contribs was created automatically
- 16:26, 2 August 2024 User account Qixzhang talk contribs was created automatically
- 13:33, 30 July 2024 Azadi talk contribs created page File:RIE CF4 etch rate 2min SiN LPCVD 07292024.png (LPCVD SiNx with CF4 in RIE)
- 13:33, 30 July 2024 Azadi talk contribs uploaded File:RIE CF4 etch rate 2min SiN LPCVD 07292024.png (LPCVD SiNx with CF4 in RIE)
- 08:59, 14 July 2024 User account Kalshaw talk contribs was created automatically
- 13:56, 26 June 2024 User account Flynch talk contribs was created automatically
- 13:56, 21 June 2024 Ericdj talk contribs created page Frequently Asked Questions (Created page with "Frequently Asked Questions How do I get access to use QNF? Please see this webpage for access to QNF: https://wiki.nano.upenn.edu/wiki/index.php?title=Join You may not need...")
- 16:50, 18 June 2024 Coana talk contribs deleted page Apogee Spinner - Positive Resist (Right) (Author request: consolidating Apogee spinner pages)
- 16:48, 18 June 2024 Coana talk contribs created page CEE Apogee Spinner (Created page with "Category:Lithography {{EquipmentInfo | name = CEE Apogee Spinner | Tool_Name = CEE Apogee Spinner | image = | imagecaption = | Instrument_Type = Lithography | Staff_Man...")
- 16:47, 18 June 2024 Coana talk contribs deleted page Apogee Spinner (name change)
- 16:46, 18 June 2024 Coana talk contribs created page Apogee Spinner (Created page with "Category:Lithography {{EquipmentInfo | name = Apogee Spinner | Tool_Name = Apogee Spinner | image = | imagecaption = | Instrument_Type = Lithography | Staff_Manager = [...")
- 16:41, 18 June 2024 Coana talk contribs deleted page Apogee Spinner - E-Beam Resist (Author request: consolidating Apogee spinner pages)
- 16:37, 18 June 2024 Coana talk contribs deleted page Apogee Spinner - Positive Resist (Left) (Author request: consolidating Apogee spinner pages)
- 08:45, 18 June 2024 Azadi talk contribs created page File:DE04 PECVD SiO2 rate etch via CHF3O2.png (DE04 etch rate for PECVD SiO2 using CHF3 and O2)
- 08:45, 18 June 2024 Azadi talk contribs uploaded File:DE04 PECVD SiO2 rate etch via CHF3O2.png (DE04 etch rate for PECVD SiO2 using CHF3 and O2)
- 08:30, 18 June 2024 Azadi talk contribs created page PECVD SiO2 via CHF3 + O2 (Created page with "== Goal == The purpose of this document is to examine the etch properties of the Oxford 80 Plus RIE system and to find the etch rate of SiO2 and S1818 MicroChem positive resi...")
- 08:05, 18 June 2024 Azadi talk contribs created page PECVD SiO2 via CF4 (Created page with "== Goal == The purpose of this document is to examine the etch properties of the Oxford 80 Plus RIE system and to find the etch rate of SiO2 and S1818 MicroChem positive resi...")
- 15:02, 17 June 2024 Coana talk contribs deleted page PECVD SiO2 via CF4 (Author request: content was: " PECVD SiO<sub>2</sub> via CF<sub>4</sub>", and the only contributor was "Coana" (talk))
- 14:58, 17 June 2024 Coana talk contribs created page PECVD SiO2 via CF4 (Created page with " PECVD SiO<sub>2</sub> via CF<sub>4</sub>")
- 14:47, 17 June 2024 Coana talk contribs created page How to Make a Mask (Created page with "https://nemo.nano.upenn.edu/media/tool_documents/lw-01-heidelberg-dwl66/How_to_Make_a_Mask_At_QNF_v05.pdf")
- 15:41, 7 June 2024 Lucasamb talk contribs moved page ALD-02: Titanium Oxide Deposition to ALD-02: Titanium Dioxide Deposition
- 09:59, 7 June 2024 Lucasamb talk contribs created page ALD-02: Titanium Oxide Deposition (Created blank page)
- 09:56, 7 June 2024 Lucasamb talk contribs created page ALD-01: Titanium Oxide Deposition (Created page with "<iframe height="300px" width=2000px" key="google" level="docs" path=https:https://docs.google.com/spreadsheets/d/e/2PACX-1vRT0Xcfp3506lnri7h04_tPNBdXSckz1XCJizwMky8hWDH0QwxxVH...")
- 10:06, 6 June 2024 User account Yijied talk contribs was created automatically
