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| | === Standard e-beam Resists === | | === Standard e-beam Resists === |
| | {| class="wikitable sortable" | | {| class="wikitable sortable" |
| − | ! Name / Datasheet !! Tone !! Composition !! Use / Thickness !! Tool Compatibility !! Developer !! Remover !! Alternative Resists | + | ! Name / Datasheet !! Tone !! Solvent Composition !! Use / Thickness !! Tool Compatibility !! Developer !! Remover !! Alternative Resists |
| | |- | | |- |
| | | [https://upenn.box.com/s/ff9s9dhl52tqagc0vbtflwf64odcwtw7 495 PMMA A8] || + || Anisole || Lower Resolution|| [https://wiki.nano.upenn.edu/wiki/index.php?title=Elionix_ELS-7500EX_E-Beam_Lithography_System EBL-01], SPN-06 || 3:1 IPA/H2O || NMP || | | | [https://upenn.box.com/s/ff9s9dhl52tqagc0vbtflwf64odcwtw7 495 PMMA A8] || + || Anisole || Lower Resolution|| [https://wiki.nano.upenn.edu/wiki/index.php?title=Elionix_ELS-7500EX_E-Beam_Lithography_System EBL-01], SPN-06 || 3:1 IPA/H2O || NMP || |
Revision as of 13:51, 3 July 2023
The QNF provides a variety of standard resists to meet demands for most applications. Some specialty resists are also sold through the QNF Stockroom. A summary of stocked resists along with some processing information can be found in the table below. Click on the resist name to access the datasheet. Other similar options that may be available in QNF are also listed.
QNF Supplied Standard Photoresists
| Name / Datasheet |
Tone |
Solvent Composition |
Use / Thickness |
Tool Compatibility |
Developer |
Remover |
Alternative Resists
|
| S1805 |
+ |
PGMEA |
General |
MA-01, LW-01, SPN-03 |
TMAH |
NMP |
KL5305
|
| S1813 |
+ |
PGMEA |
General, 1um-1.3um |
MA-01, LW-01, SPN-03 |
TMAH |
NMP |
KL5315
|
| S1818 |
+ |
PGMEA |
General |
MA-01, LW-01, SPN-03 |
TMAH |
NMP |
|
| SPR 220-3 |
+ |
Ethyl lactate, anisole, n-amyl acetate |
Etch, 2um-5um |
MA-01, SPN-03 |
TMAH |
NMP |
KPRO-3, KL6003, AZ3330F
|
| SPR 220-4.5 |
+ |
Ethyl lactate, anisole, n-amyl acetate |
Etch |
MA-01, SPN-03 |
TMAH |
NMP |
KPRO-3, KL6003, AZ3330F
|
| SPR 220-7 |
+ |
Ethyl lactate, anisole, n-amyl acetate |
Etch, 6um-12um |
MA-01, SPN-03 |
TMAH |
NMP |
AZ 12XT, AZ P4620
|
| AZ 3330F |
+ |
PGMEA |
General, Metal RIE, Plating |
MA-01, SPN-03 |
TMAH or AZ400K 1:4 |
|
SPR 220-3, SPR 220-4.5, K-PRO 3, KL6003
|
| NR7-3000P |
- |
Cyclohexanone |
Etch, General |
MA-01 |
TMAH |
|
|
| APOL-LO 3202 |
- |
PGMEA |
Liftoff |
MA-01 |
TMAH |
NMP |
|
| IP-Dip |
- |
Ethoxylated acrylates |
Nanoscribe, Epoxy |
LW-02 |
PGMEA, IPA |
|
|
| HARE SQ 2 |
- |
Cyclopentanone, gamma butyro lactone |
Epoxy |
SPN-07, MA-03 |
PGMEA (SU-8 or SQ Developer) |
N/A |
SU-8 2005
|
| HARE SQ 50 |
- |
Cyclopentanone, gamma butyro lactone |
Epoxy |
SPN-07, MA-03 |
PGMEA (SU-8 or SQ Developer) |
N/A |
SU-8 2050
|
Stockroom Photoresists
| Name / Datasheet |
Tone |
Solvent Composition |
Use / Thickness |
Tool Compatibility |
Developer |
Remover |
Alternative Resists
|
| SU-8 2005 |
- |
Cyclopentanone |
Epoxy, 4um-7um |
SPN-07, MA-03 |
PGMEA (SU-8 or SQ Developer) |
N/A |
HARE SQ 2
|
| SU-8 2050 |
- |
Cyclopentanone |
Epoxy, 40um-170um |
SPN-07, MA-03 |
PGMEA (SU-8 or SQ Developer) |
N/A |
HARE SQ 50
|
| SU-8 2100 |
- |
Cyclopentanone |
Epoxy, 100um-270um |
SPN-07, MA-03 |
PGMEA (SU-8 or SQ Developer) |
N/A |
HARE SQ 50
|
| SU-8 3050 |
- |
Cyclopentanone |
Epoxy, 40um-100um |
SPN-07, MA-03 |
PGMEA (SU-8 or SQ Developer) |
N/A |
HARE SQ 50
|
Standard e-beam Resists
| Name / Datasheet |
Tone |
Solvent Composition |
Use / Thickness |
Tool Compatibility |
Developer |
Remover |
Alternative Resists
|
| 495 PMMA A8 |
+ |
Anisole |
Lower Resolution |
EBL-01, SPN-06 |
3:1 IPA/H2O |
NMP |
|
| 495 PMMA A4 |
+ |
Anisole |
Lower Resolution, 180nm-300nm |
EBL-01, SPN-06 |
3:1 IPA/H2O |
NMP |
|
| 495 PMMA A2 |
+ |
Anisole |
Lower Resolution, 50nm-100nm |
EBL-01, SPN-06 |
3:1 IPA/H2O |
NMP |
|
| 950 PMMA A4 |
+ |
Anisole |
High Resolution, 200nm-400nm |
EBL-01, SPN-06 |
3:1 IPA/H2O |
NMP |
|
| 950 PMMA A2 |
+ |
Anisole |
High Resolution, 50nm-100nm |
EBL-01, SPN-06 |
3:1 IPA/H2O |
NMP |
1000 HARP 0.1
|
| 1000 HARP 1.3 |
+ |
Anisole |
High Resolution |
EBL-01, SPN-06 |
3:1 IPA/H2O |
NMP |
|
| 1000 HARP 0.1 |
+ |
Anisole |
High Resolution |
EBL-01, SPN-06 |
3:1 IPA/H2O |
NMP |
950 PMMA A2
|
Stockroom e-beam Resists
| Name / Datasheet |
Tone |
Solvent Composition |
Use / Thickness |
Tool Compatibility |
Developer |
Remover
|
| ZEP 520A |
+ |
Anisole |
Thicker formulation |
EBL-01, SPN-06 |
Xylenes or Amyl acetate |
NMP
|
| ZEP 520A-7 |
+ |
Anisole |
Thinner formulation |
EBL-01, SPN-06 |
Xylenes or Amyl acetate |
NMP
|
| H-SiQ 6% |
- |
MIBK |
HSQ Equivalent |
EBL-01, SPN-06 |
TMAH |
|
Other Resists
| Name / Datasheet |
Tone |
Solvent Composition |
Use / Thickness |
Tool Compatibility |
Developer |
Remover
|
| LOR 3A |
N/A |
Cyclopentanone, PGME |
Liftoff, Non-imaging |
Keep away from acetone & PGMEA! |
TMAH |
NMP
|
| PMGI SF 5S |
N/A |
Cyclopentanone, PGME |
Liftoff, Non-imaging |
Keep away from acetone & PGMEA! |
TMAH |
NMP
|
| PMGI SF 2S |
N/A |
Cyclopentanone, PGME |
Liftoff, Non-imaging |
Keep away from acetone & PGMEA! |
TMAH |
NMP
|
| NXR-1025 |
N/A |
|
Stockroom, Nanoimprint |
MA-02 |
|
Miscellaneous
These may be available but are not guaranteed to be stocked
| Name / Datasheet |
Tone |
Solvent Composition |
Use / Thickness |
Tool Compatibility |
Developer |
Remover |
Alternative Resists
|
| KL5305 |
+ |
PGMEA |
General |
|
TMAH |
NMP |
S1805
|
| KL5315 |
+ |
PGMEA |
General |
|
TMAH |
NMP |
S1813
|
| KL6003 |
+ |
PGMEA |
|
|
TMAH |
NMP |
SPR 220-3, SPR 220-4.5
|
| K-PRO 3 |
+ |
PGMEA |
Plating, Etching |
|
TMAH or AZ400K 1:4 |
NMP |
SPR 220-3, SPR 220-4.5
|
| AZ 12XT-20PL-15 |
+ |
PGMEA |
CAR (i-line), Plating, Packaging, Deep Etch, 10um-25um |
|
TMAH |
|
SPR 220-7, AZ P4620
|
| AZ P4620 |
+ |
PGMEA |
Thick Resist, Plating, Packaging |
|
TMAH or AZ400K 1:4 |
|
SPR 220-7, AZ 12XT-20PL-15
|
| ma-N 2403 |
- |
|
e-beam/DUV Mix and Match |
|
|
|
|