Difference between revisions of "PVD Equipment Overview"
Jump to navigation
Jump to search
| Line 12: | Line 12: | ||
*'''FABMATE Crucible:''' 99.9995% elemental carbon, internal volume: 4.4cc | *'''FABMATE Crucible:''' 99.9995% elemental carbon, internal volume: 4.4cc | ||
| + | *'''Intermetallic crucible:''' BN-TiB<sub>2</sub>, internal volume: 4.4cc | ||
[[Image:Fabmate_4-4cc.png|500px]] | [[Image:Fabmate_4-4cc.png|500px]] | ||
Revision as of 15:59, 1 October 2024
Jump to tool page
- PVD-01: Lesker Nano-36 Thermal Evaporator
- PVD-02: Lesker PVD75 E-Beam/Thermal Evaporator
- PVD-03: Lesker PVD75 DC/RF Sputterer
- PVD-04: Lesker PVD75 E-beam Evaporator
- PVD-05: Denton Explorer14 Magnetron Sputterer
- PVD-09: Intlvac E-beam Evaporator
E-beam Crucible Liner Breakdown
- FABMATE Crucible: 99.9995% elemental carbon, internal volume: 4.4cc
- Intermetallic crucible: BN-TiB2, internal volume: 4.4cc
