Difference between revisions of "PVD Equipment Overview"
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| + | ''Jump to tool page'' | ||
| + | * '''PVD-01:''' [[Lesker Nano-36 Thermal Evaporator | Lesker Nano-36 Thermal Evaporator]] | ||
| + | * '''PVD-02:''' [[Lesker PVD75 E-Beam/Thermal Evaporator | Lesker PVD75 E-Beam/Thermal Evaporator]] | ||
| + | * '''PVD-03:''' [[Lesker PVD75 DC/RF Sputterer | Lesker PVD75 DC/RF Sputterer]] | ||
| + | * '''PVD-04:''' [[Lesker PVD75 E-beam Evaporator | Lesker PVD75 E-beam Evaporator]] | ||
| + | * '''PVD-05:''' [[Denton Explorer14 Magnetron Sputterer | Denton Explorer14 Magnetron Sputterer]] | ||
| + | * '''PVD-09:''' [[Intlvac E-beam Evaporator | Intlvac E-beam Evaporator]] | ||
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| + | === E-beam Crucible Liner Breakdown === | ||
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| + | *'''FABMATE Crucible:''' 99.9995% elemental carbon, internal volume: 4.4cc | ||
| + | *'''Intermetallic Crucible:''' BN-TiB<sub>2</sub>, internal volume: 4.4cc | ||
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| + | [[Image:Fabmate_4-4cc.png|500px]] | ||
Latest revision as of 15:00, 1 October 2024
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- PVD-01: Lesker Nano-36 Thermal Evaporator
- PVD-02: Lesker PVD75 E-Beam/Thermal Evaporator
- PVD-03: Lesker PVD75 DC/RF Sputterer
- PVD-04: Lesker PVD75 E-beam Evaporator
- PVD-05: Denton Explorer14 Magnetron Sputterer
- PVD-09: Intlvac E-beam Evaporator
E-beam Crucible Liner Breakdown
- FABMATE Crucible: 99.9995% elemental carbon, internal volume: 4.4cc
- Intermetallic Crucible: BN-TiB2, internal volume: 4.4cc
