Difference between revisions of "PVD Equipment Overview"
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* '''PVD-05:''' [[Denton Explorer14 Magnetron Sputterer | Denton Explorer14 Magnetron Sputterer]] | * '''PVD-05:''' [[Denton Explorer14 Magnetron Sputterer | Denton Explorer14 Magnetron Sputterer]] | ||
* '''PVD-09:''' [[Intlvac E-beam Evaporator | Intlvac E-beam Evaporator]] | * '''PVD-09:''' [[Intlvac E-beam Evaporator | Intlvac E-beam Evaporator]] | ||
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| + | === E-beam Crucible Liner Breakdown === | ||
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| + | *'''FABMATE Crucible:''' 99.9995% elemental carbon | ||
Revision as of 14:51, 1 October 2024
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- PVD-01: Lesker Nano-36 Thermal Evaporator
- PVD-02: Lesker PVD75 E-Beam/Thermal Evaporator
- PVD-03: Lesker PVD75 DC/RF Sputterer
- PVD-04: Lesker PVD75 E-beam Evaporator
- PVD-05: Denton Explorer14 Magnetron Sputterer
- PVD-09: Intlvac E-beam Evaporator
E-beam Crucible Liner Breakdown
- FABMATE Crucible: 99.9995% elemental carbon