Difference between revisions of "Lesker PVD75 E-beam Evaporator"

**Lesker PVD75 E-Beam/Thermal Evaporator**
Tool Name	Lesker PVD75 E-Beam/Thermal Evaporator
Instrument Type	Physical vapor deposition
Staff Manager	David Barth
Lab Location	Bay 2
Tool Manufacturer	Kurt J. Lesker
Tool Model	PVD75
NEMO Designation	PVD-04
Lab Phone	215-898-9748
SOP Link	SOP

Latest revision as of 09:46, 16 May 2024

Description

The tool

The Kurt J. Lesker PVD75 E-beam Evaporator is an electron-beam (e-beam) evaporation tool. The tool is a fully automated system for depositing Ti, Cr, Au, and/or Pd. The tool also comes with a load-lock, allowing for fast and easy transfer of samples in and out of the system. While less flexible than the PVD-02 deposition system in terms of available materials, the PVD-04 is a much faster tool.

Available materials

The tool contains the following materials:

Au - Gold
Cr - Chromium
Pd - Palladium
Ti - Titanium

Deposition is limited to thin-film thicknesses of ~100 nm.

Resources

Training video

Link: PVD-4 Training Video

SOPs & Troubleshooting

Link: SOP

@@ Line 7: / Line 7: @@
 | imagecaption =
 | Instrument_Type = Physical vapor deposition
-| Staff_Manager = [[Jason_A._Röhr | Jason]]  (jarohr@seas.upenn.edu)
+| Staff_Manager = [[David Barth | David Barth]]
 | Lab_Location = Bay 2
 | Tool_Manufacturer = Kurt J. Lesker
 | Tool_Model = PVD75
-| Iris_Designation = PVD-04
+| NEMO_Designation = PVD-04
-| Lab_Phone = 8-9748
+| Lab_Phone = 215-898-9748
 | SOP Link = [https://www.seas.upenn.edu/~nanosop/PVD75_e-beam_SOP.htm SOP]
 }}
@@ Line 35: / Line 35: @@
 ===== SOPs & Troubleshooting =====
-Link: [https://repository.upenn.edu/scn_protocols/73/ QNF SOP]
+Link: [https://repository.upenn.edu/scn_sop/23/ SOP]
+<pdf height="800">File:PVD_04_SOP.pdf</pdf>