Difference between revisions of "Au (gold)"

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Gold is noble transition metal with atomic number 79 and symbol Au. Gold has a very high density and very low reactivity. It also has excellent thermal and electrical conductivity.
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==Equipment==
 
==Equipment==
  
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* '''PVD-05:''' [[Denton Explorer14 Magnetron Sputterer | Denton Explorer14 Magnetron Sputterer]]
 
* '''PVD-05:''' [[Denton Explorer14 Magnetron Sputterer | Denton Explorer14 Magnetron Sputterer]]
  
−
===Etching===
+
===Etching Equipment===
  
 
==Applications==
 
==Applications==
  
 
==Processes==
 
==Processes==
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 +
Gold is NOT allowed in the following tools: [[Oxford PlasmaLab 100 PECVD | CVD-01]], [[Cambridge Nanotech S200 ALD | ALD-01]], [[SPTS Si DRIE | DE-03]], [[Oxford 80 Plus RIE | DE-04]], [[Oxford Cobra ICP Etcher | DE-05]],
  
 
===Sputter Deposition Rates===
 
===Sputter Deposition Rates===
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! Pressure || Power || Rate || Pressure || Power || Rate || Pressure || Power || Rate
 
! Pressure || Power || Rate || Pressure || Power || Rate || Pressure || Power || Rate
 
|-  
 
|-  
−
| PVD-03 || 4 mTorr || 140 W || 3.1 Å s<sup>-1</sup> ||   || 3 mTorr || 140 W || 2.5 Å s<sup>-1</sup> || 03/06/23 || 5 mTorr || 140 W || 3.1 Å s<sup>-1</sup> ||  
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| PVD-03 || 4 mTorr || 140 W || 3.1 Å s<sup>-1</sup> || 02/24/23  || 3 mTorr || 140 W || 2.5 Å s<sup>-1</sup> ||  || 5 mTorr || 140 W || 3.1 Å s<sup>-1</sup> || 03/01/24
 
|-
 
|-
 
|}
 
|}
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{| class="wikitable"
 
{| class="wikitable"
 
! rowspan=2 | PVD Tool  
 
! rowspan=2 | PVD Tool  
−
! colspan=3 | Cathode 1 & 3 (DC)
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! colspan=3 | Cathodes 1 & 3 (DC)
 
! rowspan=2 | Recorded
 
! rowspan=2 | Recorded
 
|-
 
|-
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| PVD-05 || 3 mTorr || 140 W || 4.6 Å s<sup>-1</sup>  
 
| PVD-05 || 3 mTorr || 140 W || 4.6 Å s<sup>-1</sup>  
 
|-
 
|-
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|}
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'''PVD-05 Master Recipe:'''
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Step T006 is the deposition step.
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{| class="wikitable"
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! Step Number || T000 || T001 || T002 || T003 || T004 || T005 || T006 || T007 || T008 || T009 || T010 || T011 || T012 || T013
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|-
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|-
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| Step Time (sec) || 5 || 30 || 30 || 30 || 30 || 30 || [dep] || 30 || 30 || 30 || 30 || 30 || 300 || 5
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|-style="background-color:#FFFFFF"
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| Min Vacuum Setpoint (Torr) ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||
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|-
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|  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  || 
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|-style="background-color:#DBFEFF"
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| Gas - (PID or Fixed) ||  || PID || PID || PID || PID || PID || PID || PID || PID || PID || PID || PID ||  ||
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|-style="background-color:#FFFFFF"
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| Gas - PID Master Gas Select ||  || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 ||  ||
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|-
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| Gas1 - Setpoint (sccm) ||  || 10 || 10 || 10 || 10 || 10 || 10 || 10 || 10 || 10 || 10 || 10 ||  ||
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|-style="background-color:#FFFFFF"
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| Gas2 - Setpoint (sccm)  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||
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|-
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|  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||
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|-style="background-color:#DEB4DC"
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|Gas PID Pressure (mTorr) ||  || 3 || 3 || 3 || 3 || 3 || 3 || 3 || 3 || 3 || 3 || 3 ||  ||
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|-style="background-color:#DCF5E9"
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| RF Source - Sputter (Watts)  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||
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|-style="background-color:#DCF5E9"
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| RF Source - Cathode Select  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||
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|-style="background-color:#DCF5E9"
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| RF Source - Shutter  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||
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|-style="background-color:#ECFA6F"
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| DC 1 Source - Sputter (Watts) ||  || 25 || 50 || 75 || 100 || 125 || 140 || 120 || 100 || 80 || 60 || 25 ||  ||
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|-style="background-color:#ECFA6F"
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| DC 1 Source - Cathode Select ||  || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 ||  ||
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|-style="background-color:#ECFA6F"
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| DC 1 Source - Shutter ||  ||  ||  ||  ||  ||  || Open ||  ||  ||  ||  ||  ||  ||
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|-style="background-color:#FAD86F"
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| DC 2 Source - Sputter (Watts) ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||
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|-style="background-color:#FAD86F"
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|  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  || 
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|-style="background-color:#FAD86F"
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| DC 2 Source - Shutter ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||
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|-style="background-color:#6FD2FA"
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| Pressure Control (Throttle) || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes ||  ||
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|-style="background-color:#FFFFFF"
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| Ignition Pressure (mTorr) ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||
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|-
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|  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||
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|-style="background-color:#E8F213"
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| Rotation Speed (0-100%) || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 ||
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|-
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| End Process (Yes) ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  ||  || Yes
 
|}
 
|}

Latest revision as of 14:00, 9 May 2024

Gold is noble transition metal with atomic number 79 and symbol Au. Gold has a very high density and very low reactivity. It also has excellent thermal and electrical conductivity.

Equipment

Deposition Equipment

Etching Equipment

Applications

Processes

Gold is NOT allowed in the following tools: CVD-01, ALD-01, DE-03, DE-04, DE-05,

Sputter Deposition Rates

PVD Tool Cathode 2 (DC; high mag) Recorded Cathode 3 (DC) Recorded Cathode 4 (DC; high mag) Recorded
Pressure Power Rate Pressure Power Rate Pressure Power Rate
PVD-03 4 mTorr 140 W 3.1 Å s-1 02/24/23 3 mTorr 140 W 2.5 Å s-1 5 mTorr 140 W 3.1 Å s-1 03/01/24
PVD Tool Cathodes 1 & 3 (DC) Recorded
Pressure Power Rate
PVD-05 3 mTorr 140 W 4.6 Å s-1

PVD-05 Master Recipe:

Step T006 is the deposition step.

Step Number T000 T001 T002 T003 T004 T005 T006 T007 T008 T009 T010 T011 T012 T013
Step Time (sec) 5 30 30 30 30 30 [dep] 30 30 30 30 30 300 5
Min Vacuum Setpoint (Torr)
Gas - (PID or Fixed) PID PID PID PID PID PID PID PID PID PID PID
Gas - PID Master Gas Select 1 1 1 1 1 1 1 1 1 1 1
Gas1 - Setpoint (sccm) 10 10 10 10 10 10 10 10 10 10 10
Gas2 - Setpoint (sccm)
Gas PID Pressure (mTorr) 3 3 3 3 3 3 3 3 3 3 3
RF Source - Sputter (Watts)
RF Source - Cathode Select
RF Source - Shutter
DC 1 Source - Sputter (Watts) 25 50 75 100 125 140 120 100 80 60 25
DC 1 Source - Cathode Select 1 1 1 1 1 1 1 1 1 1 1
DC 1 Source - Shutter Open
DC 2 Source - Sputter (Watts)
DC 2 Source - Shutter
Pressure Control (Throttle) Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes
Ignition Pressure (mTorr)
Rotation Speed (0-100%) 50 50 50 50 50 50 50 50 50 50 50 50 50
End Process (Yes) Yes
Retrieved from "https://wiki.nano.upenn.edu/wiki/index.php?title=Au_(gold)&oldid=1620"