Focused Ion Beam Microscopy

Overview

Focused ion beams (FIB) can be used to image or mill holes in samples, depending on the ion used and the beam settings. Large ions (e.g. Xenon, Gallium) may be used to mill cross sections or thin specimens for observation in a SEM or TEM, respectively. Small ions (e.g. Helium) can create high resolution images with a large depth of field and minimal sample damage.

Equipment

• TESCAN S8000X FIB/SEM

Techniques

• EDS
• ToF-SIMS

Key Principles

Coming soon