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31 October 2024
11:40 | Lesker PVD75 DC/RF Sputterer diffhist +111 Dsabr talk contribs →DC deposition |
29 October 2024
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10:31 | Cambridge Nanotech S200 ALD 2 changes history +32 [Lucasamb (2×)] | |||
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10:31 (cur | prev) 0 Lucasamb talk contribs | ||||
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10:30 (cur | prev) +32 Lucasamb talk contribs |
28 October 2024
19:41 | Heidelberg DWL 66+ Laser Writer diffhist +86 Coana talk contribs |
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14:46 | Safety Resources 6 changes history +569 [Coana (6×)] | |||
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14:46 (cur | prev) +138 Coana talk contribs | ||||
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14:40 (cur | prev) +199 Coana talk contribs | ||||
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14:39 (cur | prev) 0 Coana talk contribs | ||||
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14:39 (cur | prev) 0 Coana talk contribs | ||||
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14:39 (cur | prev) +188 Coana talk contribs | ||||
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14:38 (cur | prev) +44 Coana talk contribs |
09:07 | IntlVac NanoQuest 1 IBE diffhist 0 Azadi talk contribs →Standard Process Information |
21 October 2024
18 October 2024
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16:08 | Lesker PVD75 DC/RF Sputterer 2 changes history 0 [Dsabr (2×)] | |||
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16:08 (cur | prev) 0 Dsabr talk contribs →DC deposition | ||||
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16:08 (cur | prev) 0 Dsabr talk contribs →DC deposition |
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10:01 | IntlVac NanoQuest 1 IBE 2 changes history +94 [Azadi (2×)] | |||
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10:01 (cur | prev) +1 Azadi talk contribs →Standard Process Information | ||||
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10:01 (cur | prev) +93 Azadi talk contribs →Standard Process Information |
16 October 2024
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16:08 | Oxford 80 Plus RIE 2 changes history +8 [Azadi (2×)] | |||
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16:08 (cur | prev) +4 Azadi talk contribs →The following materials are NOT allowed in the chamber | ||||
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16:08 (cur | prev) +4 Azadi talk contribs →The following materials are NOT allowed in the chamber |
14 October 2024
16:29 | Woollam V-VASE Ellipsometer diffhist +94 Kckeenan talk contribs →SOPs & Troubleshooting |
15:28 | TFS Quanta 600 FEG ESEM diffhist +28 Bohnn talk contribs |
15:27 | JEOL 7500F HRSEM diffhist +28 Bohnn talk contribs |
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N 14:54 | Amorphous silicon deposition 5 changes history +171 [Lucasamb (5×)] | |||
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14:54 (cur | prev) -6 Lucasamb talk contribs →Materials | ||||
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14:53 (cur | prev) +20 Lucasamb talk contribs →Materials | ||||
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14:51 (cur | prev) -121 Lucasamb talk contribs | ||||
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14:50 (cur | prev) -56 Lucasamb talk contribs | ||||
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14:50 (cur | prev) +334 Lucasamb talk contribs Created page with "== Goal == The purpose of this document is to examine the etch properties of the Oxford 80 Plus RIE system and to find the etch rate of SiO2 and S1818 MicroChem positive resi..." |
14:41 | Oxford PlasmaLab 100 PECVD diffhist +35 Lucasamb talk contribs |
11:20 | Frequently Asked Questions diffhist +144 Ericdj talk contribs |
10:20 | IntlVac NanoQuest 1 IBE diffhist +64 Azadi talk contribs |
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10:08 | Lesker PVD75 DC/RF Sputterer 2 changes history +69 [Dsabr (2×)] | |||
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10:08 (cur | prev) -20 Dsabr talk contribs →RF deposition | ||||
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10:08 (cur | prev) +89 Dsabr talk contribs →RF deposition |
11 October 2024
m 15:51 | Nanoscale Characterization Facility diffhist +152 Bohnn talk contribs |
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m 15:36 | EMS/Quorum Q150T ES Sputter Coater 2 changes history +148 [Bohnn (2×)] | |||
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15:36 (cur | prev) +137 Bohnn talk contribs added SOP link | |||
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15:17 (cur | prev) +11 Bohnn talk contribs |
15:16 | TESCAN S8000X FIB/SEM diffhist +96 Bohnn talk contribs added SOP link |
3 October 2024
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16:51 | Lesker PVD75 DC/RF Sputterer 3 changes history +109 [Dsabr (3×)] | |||
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16:51 (cur | prev) +1 Dsabr talk contribs →RF deposition | ||||
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16:38 (cur | prev) +28 Dsabr talk contribs →RF deposition | ||||
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16:37 (cur | prev) +80 Dsabr talk contribs →DC & RF sputtering process data |
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11:40 | IntlVac NanoQuest 1 IBE 7 changes history -121 [Azadi (7×)] | |||
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11:40 (cur | prev) -2 Azadi talk contribs →Description | ||||
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11:27 (cur | prev) +40 Azadi talk contribs →Standard Process Information | ||||
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11:22 (cur | prev) -192 Azadi talk contribs →Standard Process Information | ||||
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11:22 (cur | prev) +214 Azadi talk contribs | ||||
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10:59 (cur | prev) -475 Azadi talk contribs →Process information from user community | ||||
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10:59 (cur | prev) +241 Azadi talk contribs →Process information from user community | ||||
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09:37 (cur | prev) +53 Azadi talk contribs |
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11:20 | Equipment 3 changes history +50 [Azadi (3×)] | |||
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11:20 (cur | prev) +21 Azadi talk contribs →Etching | ||||
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11:19 (cur | prev) +4 Azadi talk contribs →Etching | ||||
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11:19 (cur | prev) +25 Azadi talk contribs →Etching |