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Show new changes starting from 19:46, 31 October 2024
   
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31 October 2024

     11:40  Lesker PVD75 DC/RF Sputterer diffhist +111 Dsabr talk contribs →‎DC deposition

29 October 2024

     10:31  Cambridge Nanotech S200 ALD‎‎ 2 changes history +32 [Lucasamb‎ (2×)]
     
10:31 (cur | prev) 0 Lucasamb talk contribs
     
10:30 (cur | prev) +32 Lucasamb talk contribs

28 October 2024

     19:41  Heidelberg DWL 66+ Laser Writer diffhist +86 Coana talk contribs
     14:46  Safety Resources‎‎ 6 changes history +569 [Coana‎ (6×)]
     
14:46 (cur | prev) +138 Coana talk contribs
     
14:40 (cur | prev) +199 Coana talk contribs
     
14:39 (cur | prev) 0 Coana talk contribs
     
14:39 (cur | prev) 0 Coana talk contribs
     
14:39 (cur | prev) +188 Coana talk contribs
     
14:38 (cur | prev) +44 Coana talk contribs
     09:07  IntlVac NanoQuest 1 IBE diffhist 0 Azadi talk contribs →‎Standard Process Information

21 October 2024

     10:50  IntlVac NanoQuest 1 IBE diffhist +28 Azadi talk contribs →‎Standard Process Information

18 October 2024

     16:08  Lesker PVD75 DC/RF Sputterer‎‎ 2 changes history 0 [Dsabr‎ (2×)]
     
16:08 (cur | prev) 0 Dsabr talk contribs →‎DC deposition
     
16:08 (cur | prev) 0 Dsabr talk contribs →‎DC deposition
     10:01  IntlVac NanoQuest 1 IBE‎‎ 2 changes history +94 [Azadi‎ (2×)]
     
10:01 (cur | prev) +1 Azadi talk contribs →‎Standard Process Information
     
10:01 (cur | prev) +93 Azadi talk contribs →‎Standard Process Information

16 October 2024

     16:08  Oxford 80 Plus RIE‎‎ 2 changes history +8 [Azadi‎ (2×)]
     
16:08 (cur | prev) +4 Azadi talk contribs →‎The following materials are NOT allowed in the chamber
     
16:08 (cur | prev) +4 Azadi talk contribs →‎The following materials are NOT allowed in the chamber

14 October 2024

     16:29  Woollam V-VASE Ellipsometer diffhist +94 Kckeenan talk contribs →‎SOPs & Troubleshooting
     15:28  TFS Quanta 600 FEG ESEM diffhist +28 Bohnn talk contribs
     15:27  JEOL 7500F HRSEM diffhist +28 Bohnn talk contribs
N    14:54  Amorphous silicon deposition‎‎ 5 changes history +171 [Lucasamb‎ (5×)]
     
14:54 (cur | prev) -6 Lucasamb talk contribs →‎Materials
     
14:53 (cur | prev) +20 Lucasamb talk contribs →‎Materials
     
14:51 (cur | prev) -121 Lucasamb talk contribs
     
14:50 (cur | prev) -56 Lucasamb talk contribs
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14:50 (cur | prev) +334 Lucasamb talk contribs Created page with "== Goal == The purpose of this document is to examine the etch properties of the Oxford 80 Plus RIE system and to find the etch rate of SiO2 and S1818 MicroChem positive resi..."
     14:41  Oxford PlasmaLab 100 PECVD diffhist +35 Lucasamb talk contribs
     11:20  Frequently Asked Questions diffhist +144 Ericdj talk contribs
     10:20  IntlVac NanoQuest 1 IBE diffhist +64 Azadi talk contribs
     10:08  Lesker PVD75 DC/RF Sputterer‎‎ 2 changes history +69 [Dsabr‎ (2×)]
     
10:08 (cur | prev) -20 Dsabr talk contribs →‎RF deposition
     
10:08 (cur | prev) +89 Dsabr talk contribs →‎RF deposition

11 October 2024

 m   15:51  Nanoscale Characterization Facility diffhist +152 Bohnn talk contribs
 m   15:36  EMS/Quorum Q150T ES Sputter Coater‎‎ 2 changes history +148 [Bohnn‎ (2×)]
 m   
15:36 (cur | prev) +137 Bohnn talk contribs added SOP link
 m   
15:17 (cur | prev) +11 Bohnn talk contribs
     15:16  TESCAN S8000X FIB/SEM diffhist +96 Bohnn talk contribs added SOP link

3 October 2024

     16:51  Lesker PVD75 DC/RF Sputterer‎‎ 3 changes history +109 [Dsabr‎ (3×)]
     
16:51 (cur | prev) +1 Dsabr talk contribs →‎RF deposition
     
16:38 (cur | prev) +28 Dsabr talk contribs →‎RF deposition
     
16:37 (cur | prev) +80 Dsabr talk contribs →‎DC & RF sputtering process data
     11:40  IntlVac NanoQuest 1 IBE‎‎ 7 changes history -121 [Azadi‎ (7×)]
     
11:40 (cur | prev) -2 Azadi talk contribs →‎Description
     
11:27 (cur | prev) +40 Azadi talk contribs →‎Standard Process Information
     
11:22 (cur | prev) -192 Azadi talk contribs →‎Standard Process Information
     
11:22 (cur | prev) +214 Azadi talk contribs
     
10:59 (cur | prev) -475 Azadi talk contribs →‎Process information from user community
     
10:59 (cur | prev) +241 Azadi talk contribs →‎Process information from user community
     
09:37 (cur | prev) +53 Azadi talk contribs
     11:20  Equipment‎‎ 3 changes history +50 [Azadi‎ (3×)]
     
11:20 (cur | prev) +21 Azadi talk contribs →‎Etching
     
11:19 (cur | prev) +4 Azadi talk contribs →‎Etching
     
11:19 (cur | prev) +25 Azadi talk contribs →‎Etching