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Combined display of all available logs of Quattrone Nanofabrication Facility. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 50 | older 50) (20 | 50 | 100 | 250 | 500)- 13:41, 30 July 2025 Coana talk contribs created page File:SOP Microfluidics.pdf (Contains visual steps for soft lithography fabrication)
- 13:41, 30 July 2025 Coana talk contribs uploaded File:SOP Microfluidics.pdf (Contains visual steps for soft lithography fabrication)
- 13:32, 28 July 2025 Coana talk contribs created page Category:Metrology (Created blank page)
- 13:29, 28 July 2025 Coana talk contribs created page Category:E-Beam Lithography (Created page with "Category:Lithography")
- 13:27, 28 July 2025 Coana talk contribs created page Category:Soft Lithography (Created blank page)
- 17:06, 25 July 2025 Coana talk contribs created page Soft Lithography (Created page with "Category:Lithography Category:Soft Lithography '''THIS PAGE IS UNDER CONSTRUCTION''' * [https://wiki.nano.upenn.edu/wiki/images/c/cf/Microfluidics_Process_Flow.pdf Pr...")
- 16:43, 25 July 2025 Coana talk contribs created page Category:Plasma Etch (Created page with "Category:Etch")
- 16:43, 25 July 2025 Coana talk contribs created page Category:Etch (Created blank page)
- 16:37, 25 July 2025 Coana talk contribs created page Category:Equipment (Created blank page)
- 16:35, 25 July 2025 Coana talk contribs created page Category:Resist Coating (Created page with "Category:Lithography")
- 16:34, 25 July 2025 Coana talk contribs created page Category:QNF (Created page with "Category:Facility")
- 16:33, 25 July 2025 Coana talk contribs created page Category:Lithography (Created page with "Category:Lithography")
- 16:32, 25 July 2025 Coana talk contribs created page Category:Photolithography (Created page with "Category:LithographyCategory:Photolithography")
- 15:17, 25 July 2025 Coana talk contribs created page Photolithography (Created page with "'''THIS PAGE IS UNDER CONSTRUCTION''' =====Resources===== *[https://www.epfl.ch/research/facilities/cmi/process/photolithography/introductiontophotolithography/ Introduction...")
- 11:32, 25 July 2025 Coana talk contribs created page Category:Atomic Layer Deposition (Created page with "Category:Deposition")
- 11:30, 25 July 2025 Coana talk contribs created page Category:Chemical Vapor Deposition (Created page with "Category:Deposition")
- 11:29, 25 July 2025 Coana talk contribs created page Category:Sputtering (Created page with "Category:DepositionCategory:Physical Vapor Deposition")
- 11:27, 25 July 2025 Coana talk contribs created page Category:Deposition (Created page with "Category:QNF")
- 11:26, 25 July 2025 Coana talk contribs created page Category:Evaporation (Created page with "Category:DepositionCategory:Physical Vapor Deposition")
- 11:14, 25 July 2025 Coana talk contribs created page Category:Physical Vapor Deposition (Created page with "Category:Deposition")
- 15:56, 24 July 2025 Coana talk contribs created page File:10mm n70opt 4.jpg (AZ1500 10mm with optical focus, June 2025)
- 15:56, 24 July 2025 Coana talk contribs uploaded File:10mm n70opt 4.jpg (AZ1500 10mm with optical focus, June 2025)
- 15:15, 24 July 2025 Coana talk contribs uploaded a new version of File:LW-01.jpeg (Cropped image)
- 15:12, 24 July 2025 Coana talk contribs created page File:DWL schematic.PNG (Schematic of pattern exposure with the DWL66+ Source -- TheLithographer.com, Surface Issue, May 2025 [https://heidelberg-instruments.com/wp-content/uploads/2025/05/The-Lithographer-Surface-Issue.pdf])
- 15:12, 24 July 2025 Coana talk contribs uploaded File:DWL schematic.PNG (Schematic of pattern exposure with the DWL66+ Source -- TheLithographer.com, Surface Issue, May 2025 [https://heidelberg-instruments.com/wp-content/uploads/2025/05/The-Lithographer-Surface-Issue.pdf])
- 15:11, 24 July 2025 Coana talk contribs deleted page File:DWL schematic.PNG (To update summary)
- 15:08, 24 July 2025 Coana talk contribs created page File:DWL schematic.PNG
- 15:08, 24 July 2025 Coana talk contribs uploaded File:DWL schematic.PNG
- 17:25, 15 July 2025 Coana talk contribs created page File:Microfluidics Process Flow.pdf
- 17:25, 15 July 2025 Coana talk contribs uploaded File:Microfluidics Process Flow.pdf
- 16:41, 28 April 2025 Coana talk contribs created page ABM Mask Aligner (Created page with "Category:Soft Lithography {{EquipmentInfo | name = ABM Mask Aligner | Tool_Name = ABM Mask Aligner | image = | imagecaption = | Instrument_Type = Lithography | Staff_Ma...")
- 17:31, 27 February 2025 Coana talk contribs created page Intro to NEMO (Created page with "<pdf height="800">File:NEMO.pdf</pdf>")
- 17:29, 27 February 2025 Coana talk contribs created page File:NEMO.pdf
- 17:29, 27 February 2025 Coana talk contribs uploaded File:NEMO.pdf
- 15:54, 14 January 2025 Coana talk contribs created page File:How to Make a Mask At QNF v05.pdf
- 15:54, 14 January 2025 Coana talk contribs uploaded File:How to Make a Mask At QNF v05.pdf
- 16:01, 7 January 2025 Coana talk contribs created page General Wet Bench Processing (Created page with "Category:Wet Processing == Description == Wet processing for benches outside of Bay 3 ===== Applications ===== *Resist development *Sample cleaning *Liftoff ===== Resou...")
- 17:50, 18 June 2024 Coana talk contribs deleted page Apogee Spinner - Positive Resist (Right) (Author request: consolidating Apogee spinner pages)
- 17:48, 18 June 2024 Coana talk contribs created page CEE Apogee Spinner (Created page with "Category:Lithography {{EquipmentInfo | name = CEE Apogee Spinner | Tool_Name = CEE Apogee Spinner | image = | imagecaption = | Instrument_Type = Lithography | Staff_Man...")
- 17:47, 18 June 2024 Coana talk contribs deleted page Apogee Spinner (name change)
- 17:46, 18 June 2024 Coana talk contribs created page Apogee Spinner (Created page with "Category:Lithography {{EquipmentInfo | name = Apogee Spinner | Tool_Name = Apogee Spinner | image = | imagecaption = | Instrument_Type = Lithography | Staff_Manager = [...")
- 17:41, 18 June 2024 Coana talk contribs deleted page Apogee Spinner - E-Beam Resist (Author request: consolidating Apogee spinner pages)
- 17:37, 18 June 2024 Coana talk contribs deleted page Apogee Spinner - Positive Resist (Left) (Author request: consolidating Apogee spinner pages)
- 16:02, 17 June 2024 Coana talk contribs deleted page PECVD SiO2 via CF4 (Author request: content was: " PECVD SiO<sub>2</sub> via CF<sub>4</sub>", and the only contributor was "Coana" (talk))
- 15:58, 17 June 2024 Coana talk contribs created page PECVD SiO2 via CF4 (Created page with " PECVD SiO<sub>2</sub> via CF<sub>4</sub>")
- 15:47, 17 June 2024 Coana talk contribs created page How to Make a Mask (Created page with "https://nemo.nano.upenn.edu/media/tool_documents/lw-01-heidelberg-dwl66/How_to_Make_a_Mask_At_QNF_v05.pdf")
- 12:18, 1 April 2024 Coana talk contribs created page File:LW-01 S1818Lines 5um Feb2024.png (65mW, 70% intensity, + 20 focus)
- 12:18, 1 April 2024 Coana talk contribs uploaded File:LW-01 S1818Lines 5um Feb2024.png (65mW, 70% intensity, + 20 focus)
- 12:17, 1 April 2024 Coana talk contribs created page File:LW-01 S1818Lines 25um Feb2024.png (65mW, 70% intensity, + 20 focus)
- 12:17, 1 April 2024 Coana talk contribs uploaded File:LW-01 S1818Lines 25um Feb2024.png (65mW, 70% intensity, + 20 focus)
