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Combined display of all available logs of Quattrone Nanofabrication Facility. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
- 11:12, 6 November 2024 Azadi talk contribs created page File:DE01 SOP.pdf (DE01_SOP)
- 11:12, 6 November 2024 Azadi talk contribs uploaded File:DE01 SOP.pdf (DE01_SOP)
- 11:01, 6 November 2024 Azadi talk contribs created page File:IBE.jpg (IBE)
- 11:01, 6 November 2024 Azadi talk contribs uploaded File:IBE.jpg (IBE)
- 13:27, 30 September 2024 Azadi talk contribs created page IntlVac NanoQuest 1 IBE (Created page with "Category:Etch {{EquipmentInfo | name = IntlVac Nanoquest 1 | Tool_Name = IntlVac IBE | image = 300px | imagecaption = | Instrument_Type = Etch | St...")
- 13:56, 16 September 2024 Azadi talk contribs created page File:SiO2 etch via DE04 CHF3 O2.png
- 13:56, 16 September 2024 Azadi talk contribs uploaded File:SiO2 etch via DE04 CHF3 O2.png
- 13:48, 16 September 2024 Azadi talk contribs created page PECVD SiNx via CHF3 + O2 (Created page with "== Results == center|800px")
- 13:46, 16 September 2024 Azadi talk contribs created page PECVD SiNx via CF4 (Created page with "== Results == center|800px")
- 13:44, 16 September 2024 Azadi talk contribs uploaded a new version of File:SiN etch on DE-04.png
- 13:38, 16 September 2024 Azadi talk contribs created page File:SiN etch on DE-04.png (SiN etch on DE04 CHF3O2)
- 13:38, 16 September 2024 Azadi talk contribs uploaded File:SiN etch on DE-04.png (SiN etch on DE04 CHF3O2)
- 13:33, 30 July 2024 Azadi talk contribs created page File:RIE CF4 etch rate 2min SiN LPCVD 07292024.png (LPCVD SiNx with CF4 in RIE)
- 13:33, 30 July 2024 Azadi talk contribs uploaded File:RIE CF4 etch rate 2min SiN LPCVD 07292024.png (LPCVD SiNx with CF4 in RIE)
- 08:45, 18 June 2024 Azadi talk contribs created page File:DE04 PECVD SiO2 rate etch via CHF3O2.png (DE04 etch rate for PECVD SiO2 using CHF3 and O2)
- 08:45, 18 June 2024 Azadi talk contribs uploaded File:DE04 PECVD SiO2 rate etch via CHF3O2.png (DE04 etch rate for PECVD SiO2 using CHF3 and O2)
- 08:30, 18 June 2024 Azadi talk contribs created page PECVD SiO2 via CHF3 + O2 (Created page with "== Goal == The purpose of this document is to examine the etch properties of the Oxford 80 Plus RIE system and to find the etch rate of SiO2 and S1818 MicroChem positive resi...")
- 08:05, 18 June 2024 Azadi talk contribs created page PECVD SiO2 via CF4 (Created page with "== Goal == The purpose of this document is to examine the etch properties of the Oxford 80 Plus RIE system and to find the etch rate of SiO2 and S1818 MicroChem positive resi...")
- 10:00, 22 May 2024 Azadi talk contribs created page File:DE06 SOP v03.pdf
- 10:00, 22 May 2024 Azadi talk contribs uploaded File:DE06 SOP v03.pdf
- 14:46, 25 March 2024 Azadi talk contribs created page How plasma etch works (Created page with "Plasma etching is a crucial process in semiconductor manufacturing, enabling the precise fabrication of intricate patterns on silicon wafers. This technique is fundamental in...")
- 14:45, 25 March 2024 Azadi talk contribs created page Ever wondered how plasma etch works? (Created page with "Plasma etching is a crucial process in semiconductor manufacturing, enabling the precise fabrication of intricate patterns on silicon wafers. This technique is fundamental in...")
- 09:57, 20 March 2024 Azadi talk contribs created page Fiji G2 ALD (Created page with "Category:Deposition {{EquipmentInfo | name = Veeco Fiji G2 | Tool_Name = Veeco Figi G2 | image = 300px | imagecaption = | Instrument_Type = Deposit...")
- 09:56, 6 December 2022 Azadi talk contribs created page File:600cyc .4 sec 8 sec dec 6 2022.png
- 09:56, 6 December 2022 Azadi talk contribs uploaded File:600cyc .4 sec 8 sec dec 6 2022.png
- 14:33, 28 November 2022 Azadi talk contribs created page File:Sinx dep rate on cvd-01.jpg
- 14:33, 28 November 2022 Azadi talk contribs uploaded File:Sinx dep rate on cvd-01.jpg
- 14:32, 28 November 2022 Azadi talk contribs created page File:Sio2 dep on cvd-01.jpg
- 14:32, 28 November 2022 Azadi talk contribs uploaded File:Sio2 dep on cvd-01.jpg
- 08:28, 26 October 2022 Azadi talk contribs created page File:Alumina Oct6.jpg
- 08:28, 26 October 2022 Azadi talk contribs uploaded File:Alumina Oct6.jpg
- 08:22, 26 October 2022 Azadi talk contribs created page File:Hafnia Oct6.jpg
- 08:22, 26 October 2022 Azadi talk contribs uploaded File:Hafnia Oct6.jpg
- 15:41, 19 October 2022 Azadi talk contribs created page File:HfO2.png (HfO2 process control 150C)
- 15:41, 19 October 2022 Azadi talk contribs uploaded File:HfO2.png (HfO2 process control 150C)
- 15:37, 19 October 2022 Azadi talk contribs created page File:Alumina.png (ALD alumina process control_150C)
- 15:37, 19 October 2022 Azadi talk contribs uploaded File:Alumina.png (ALD alumina process control_150C)
- 14:23, 16 March 2022 Azadi talk contribs created page Oxford PlasmaLab 100 PECVD (Created page with "Category:Deposition {{EquipmentInfo | name = Cambridge Nanotech S200 ALD | Tool_Name = Cambridge Nanotech S200 ALD | image = 300px | imagecaption =...")
- 14:16, 16 March 2022 User account Azadi talk contribs was created automatically
