Woollam V-VASE Ellipsometer
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| Tool Name | Woollam V-VASE Ellipsometer |
|---|---|
| Instrument Type | Metrology |
| Staff Manager | Eric Johnston |
| Lab Location | Cleanroom Corridor |
| Tool Manufacturer | J. A. Woollam Co. |
| Tool Model | V-Vase |
| NEMO Designation | MET-06 |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The V-VASE is a Variable Angle Spectroscopic Ellipsometer and features totally automated thin film characterization, high-precision angle, and a wide spectral range (240nm to 1700nm). It has a vertical sample mounting, automated sample mapping, and focused spot size. Some of the key benefits are: highest precision and accuracy of any Spectroscopic Ellipsometer, totally automated angle of incidence, nondestructive materials analysis, easily characterize all types of materials: semiconductors, dielectrics, polymers, metals, multilayers, and more
Applications
- Reflection and Transmission Ellipsometry
- Generalized Ellipsometry
- Reflectance (R) intensity
- Transmittance (T) intensity
- Cross-polarized R/T
- Depolarization
- Scatterometry
- Mueller-matrix