CEE Apogee Spinner

CEE Apogee Spinner

Tool Name	CEE Apogee Spinner
Instrument Type	Lithography
Staff Manager	Ana Cohen
Lab Location	Bays 4, 5 & 6
Tool Manufacturer	CEE
Tool Model	Apogee
NEMO Designation	SPN-01, -03, -06, -08, -09
Lab Phone
SOP Link	SOP

Description

CEE Apogee spincoaters are located in Bays 4, 5 and 6. Control of ramp rate and speed. Includes wafer centering step. *HMDS spin-on is not allowed outside of SPN-04*

Select SPN-01 when submitting training request on NEMO. Share specific process information in the description.

Allowed Materials

SPN-01: Acetone compatible/soluble resists only – S18xx, SPR 220-x, AZ series, KL series, K-Pro. No LOR, PMGI or Polyimide!
SPN-03: LOR, PMGI, Polyimide
SPN-06: E-beam resist only – PMMA A series, 1000 HARP series, ZEP520, HSQ. No LOR, PMGI or Polyimide!
SPN-08: Negative epoxy resists only - SU8, HARE SQ
SPN-09: PDMS

Resources

SOPs & Troubleshooting

• SOP: SOP
• Video - Manual Dispense
• Video - Centering Device
• Video - Chuck Installation
• Video - Chuck Assembly