Titanium is a transition metal with atomic number 22 and symbol Ti. Titanium has a low density, high strength and is resistant to corrosion by water. It has relatively poor electrical and thermal conduction compared to most metals.
Equipment
Deposition Equipment
Etching
Application
Processes
Sputter Deposition Rates
| PVD Tool
|
Cathode 2 (DC; high mag)
|
Recorded
|
Cathode 3 (DC)
|
Recorded
|
Cathode 4 (DC; high mag)
|
Recorded
|
| Pressure |
Power |
Rate |
Pressure |
Power |
Rate |
Pressure |
Power |
Rate
|
| PVD-03 |
6 mTorr |
300 W |
1.8 Å s-1 |
|
5 mTorr |
300 W |
0.98 Å s-1 |
03/06/23 |
6 mTorr |
300 W |
0.8 Å s-1 |
|
| PVD Tool
|
Cathode 2 (DC; high mag)
|
Recorded
|
| Pressure |
Power |
Rate |
Pressure |
Power |
Rate |
Pressure |
Power |
Rate
|
| PVD-05 |
3 mTorr |
350 W |
2.0 Å s-1 |
|