Filmetrics Profilm3D
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| Tool Name | Filmetrics Profilm3D Optical Profilometer |
|---|---|
| Instrument Type | Metrology |
| Staff Manager | David Barth |
| Lab Location | Cleanroom Corridor |
| Tool Manufacturer | Filmetrics |
| Tool Model | Profilm3D |
| NEMO Designation | MET-05 |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The Profilm3D is an optical profilometer capable of white light interferometry (WLI), green light interferometry (GLI), and phase shift interferometry (PSI). It can measure surface topography, roughness, and step heights from 1 nm up to 10 mm. The tool has two Mirau interferometry objectives: a 10x objective with a field of view ~2x2mm for high speed and large area measurements and a 50x objective for spatial resolution up to 0.176 μm.
Applications
- Step height measurements
- Surface roughness measurements
- 3D mapping of surfaces