Developers at QNF

From Quattrone Nanofabrication Facility
Revision as of 17:31, 25 July 2025 by Coana (talk | contribs)
Jump to navigation Jump to search

The following are developers you may encounter in the QNF wet benches.

Please note: Cross contaminating inorganic developer baths with tetramethylammonium hydroxide (TMAH) based metal ion free developers, even at parts per million levels, will seriously degrade or completely neutralize the dissolution performance of the inorganic developer. Use extreme caution when sharing dishes between a TMAH based developer and an inorganic process and always keep the developer types segregated when both are present.

Name Manufacturer Chemical Composition Hazards Use Alternatives
TMAH 0.26N KemLab 0.26N TMAH (Metal Ion Free) Strong Base -- Toxic, Irritant (can cause chemical burns, lethal for high surface areas) Photoresist Development (e.g. S1800 series, IP3500), Liftoff Resists, HMDS Removal, Aluminum Etchant CD-26, AZ300MIF
CD-26 Microposit/Dupont 0.26N TMAH (Metal Ion Free) Strong Base -- Toxic, Irritant (can cause chemical burns, lethal for high surface areas) Photoresist Development, Liftoff Resists, HMDS Removal, Aluminum Etchant TMAH 0.26N (preferred), AZ300MIF
AZ300 MIF AZ Materials/Merck 0.26N TMAH (Metal Ion Free) Strong Base -- Toxic, Irritant (can cause chemical burns, lethal for high surface areas) Photoresist Development, Liftoff Resists, HMDS Removal, Aluminum Etchant TMAH 0.26N (preferred), CD-26
CD-26A Microposit/Dupont 0.26N TMAH (Metal Ion Free) w/ Surfactant Strong Base -- Toxic, Irritant (can cause chemical burns, lethal for high surface areas) Photoresist Development, Liftoff Resists, HMDS Removal, Aluminum Etchant AZ917MIF, TMAH 0.26N, CD-26, AZ300MIF
AZ917 MIF AZ Materials/Merck 0.26N TMAH (Metal Ion Free) w/ Surfactant Strong Base -- Toxic, Irritant (can cause chemical burns, lethal for high surface areas) Photoresist Development, Liftoff Resists, HMDS Removal, Aluminum Etchant CD-26A, TMAH 0.26N, CD-26, AZ300MIF
MF321 Microposit/Dupont 0.21N TMAH (Metal Ion Free) w/ Surfactant Strong Base -- Toxic, Irritant (can cause chemical burns, lethal for high surface areas) Photoresist Development, Liftoff Resists, HMDS Removal, Aluminum Etchant AZ422 MIF, TMAH 0.26N
AZ422 MIF AZ Materials/Merck 0.21N TMAH (Metal Ion Free) w/ Surfactant Strong Base -- Toxic, Irritant (can cause chemical burns, lethal for high surface areas) Photoresist Development, Liftoff Resists, HMDS Removal, Aluminum Etchant MF321, TMAH 0.26N
AZ400K AZ Materials/Merck Potassium Borates (Metal Ion Bearing) Strong Base -- Irritant, Corrosive Development of Thick Photoresists (AZP4620), Mask Plates (AZ1500) -- Manually dilute 1:3 or 1:4 with DI water
SU-8 Developer MicroChem/Kayaku PGMEA (1-methoxy-2-propanol acetate) Organic Solvent -- Flammable SU-8, HARE SQ, IP-S & IP-Dip Development HARE SQ Developer (preferred)
HARE SQ Developer KemLab PGMEA (1-methoxy-2-propanol acetate) Organic Solvent -- Flammable HARE SQ, SU-8, IP-S & IP-Dip Development SU-8 Developer
O-Xylene N/A O-Xylene Organic Solvent -- Flammable, Irritant ZEP520 Amyl Acetate (preferred)